Programmable low-power low-noise capacitance to voltage converter for MEMS accelerometers

Royo, G. (Universidad de Zaragoza) ; Sánchez-Azqueta, C. (Universidad de Zaragoza) ; Gimeno, C. ; Aldea, C. (Universidad de Zaragoza) ; Celma, S. (Universidad de Zaragoza)

Resumen: In this work, we present a capacitance-to-voltage converter (CVC) for capacitive accelerometers based on microelectromechanical systems (MEMS). Based on a fully-differential transimpedance amplifier (TIA), it features a 34-dB transimpedance gain control and over one decade programmable bandwidth, from 75 kHz to 1.2 MHz. The TIA is aimed for low-cost low-power capacitive sensor applications. It has been designed in a standard 0.18-µm CMOS technology and its power consumption is only 54 µW. At the maximum transimpedance configuration, the TIA shows an equivalent input noise of 42 fA/vHz at 50 kHz, which corresponds to 100 µg/vHz.

Idioma: Inglés

DOI: 10.3390/s17010067

Año: 2017

Publicado en: Sensors (Switzerland) 17, 1 (2017), [10 pp.]
ISSN: 1424-8220

Factor impacto JCR: 2.475 (2017)

Categ. JCR: CHEMISTRY, ANALYTICAL rank: 30 / 80 = 0.375 (2017) - Q2 - T2
Categ. JCR: INSTRUMENTS & INSTRUMENTATION rank: 16 / 61 = 0.262 (2017) - Q2 - T1
Categ. JCR: ELECTROCHEMISTRY rank: 15 / 28 = 0.536 (2017) - Q3 - T2

Factor impacto SCIMAGO: 0.584 - Analytical Chemistry (Q2) - Atomic and Molecular Physics, and Optics (Q2) - Medicine (miscellaneous) (Q2) - Electrical and Electronic Engineering (Q2) - Instrumentation (Q2) - Biochemistry (Q3)

Financiación: info:eu-repo/grantAgreement/ES/MINECO/BES-2015-073748
Financiación: info:eu-repo/grantAgreement/ES/MINECO-FEDER/TEC2014-52840-R

Tipo y forma: Article (Published version)

Área (Departamento): Área Electrónica (Dpto. Ingeniería Electrón.Com.)