000078016 001__ 78016
000078016 005__ 20190227103821.0
000078016 0247_ $$2doi$$a10.1016/j.memsci.2014.02.007
000078016 0248_ $$2sideral$$a86903
000078016 037__ $$aART-2014-86903
000078016 041__ $$aeng
000078016 100__ $$0(orcid)0000-0002-8448-7543$$aPellejero, I.
000078016 245__ $$aReinforced SIL-1 micromembranes integrated on chip: APPLICATION to CO2 separation
000078016 260__ $$c2014
000078016 5060_ $$aAccess copy available to the general public$$fUnrestricted
000078016 5203_ $$aA novel 4-step microfabrication process is proposed in this work to prepare arrays of c-oriented silicalite (SIL-1) micromembranes on customized silicon nitride (Si3Nx) microsieves. The arrays are integrated on chip and their overall porosity values can be tuned from 1.6% to 19.9%. A low stress Si3Nx microfabricated sieve has been used as support to reinforce via mechanical interlocking and to reduce the effects of the residual stress during membrane processing. The secondary hydrothermal growth over the Si3Nx microsieves also changes the SIL-1 chemistry, improving its affinity towards CO2 adsorption. As a result, the SIL-1/Si3Nx micromembranes integrated on chip facilitate the preferential permeation of CO2 in CO2/H2 mixtures, showing a maximum CO2/H2 separation factor of 16.9 and a CO2 permeance of 8.2×10-7 mol m-2 s-1 Pa-1 at ambient conditions.
000078016 540__ $$9info:eu-repo/semantics/openAccess$$aby-nc-nd$$uhttp://creativecommons.org/licenses/by-nc-nd/3.0/es/
000078016 590__ $$a5.056$$b2014
000078016 591__ $$aPOLYMER SCIENCE$$b7 / 82 = 0.085$$c2014$$dQ1$$eT1
000078016 591__ $$aENGINEERING, CHEMICAL$$b7 / 135 = 0.052$$c2014$$dQ1$$eT1
000078016 655_4 $$ainfo:eu-repo/semantics/article$$vinfo:eu-repo/semantics/acceptedVersion
000078016 700__ $$0(orcid)0000-0002-4931-1358$$aUrbiztondo, M. A.$$uUniversidad de Zaragoza
000078016 700__ $$0(orcid)0000-0001-9897-6527$$aPina, M. P.$$uUniversidad de Zaragoza
000078016 700__ $$0(orcid)0000-0002-8701-9745$$aSantamaría, J.$$uUniversidad de Zaragoza
000078016 7102_ $$15005$$2555$$aUniversidad de Zaragoza$$bDpto. Ing.Quím.Tecnol.Med.Amb.$$cÁrea Ingeniería Química
000078016 7102_ $$15005$$2790$$aUniversidad de Zaragoza$$bDpto. Ing.Quím.Tecnol.Med.Amb.$$cÁrea Tecnologi. Medio Ambiente
000078016 773__ $$g460 (2014), 34-45$$pJ. membr. sci.$$tJOURNAL OF MEMBRANE SCIENCE$$x0376-7388
000078016 8564_ $$s698368$$uhttps://zaguan.unizar.es/record/78016/files/texto_completo.pdf$$yPostprint
000078016 8564_ $$s28210$$uhttps://zaguan.unizar.es/record/78016/files/texto_completo.jpg?subformat=icon$$xicon$$yPostprint
000078016 909CO $$ooai:zaguan.unizar.es:78016$$particulos$$pdriver
000078016 951__ $$a2019-02-27-10:20:35
000078016 980__ $$aARTICLE