Mass Sensing for the Advanced Fabrication of Nanomechanical Resonators

Gruber, G. ; Urgell, C. ; Tavernarakis, A. ; Stavrinadis, A.: Tepsic, S. ; Magén, C. (Universidad de Zaragoza) ; Sangiao, S. (Universidad de Zaragoza) ; De Teresa, J.M. (Universidad de Zaragoza) ; Verlot, P. ; Bachtold, A.

Resumen: We report on a nanomechanical engineering method to monitor matter growth in real time via e-beam electromechanical coupling. This method relies on the exceptional mass sensing capabilities of nanomechanical resonators. Focused electron beam-induced deposition (FEBID) is employed to selectively grow platinum particles at the free end of singly clamped nanotube cantilevers. The electron beam has two functions: it allows both to grow material on the nanotube and to track in real time the deposited mass by probing the noise-driven mechanical resonance of the nanotube. On the one hand, this detection method is highly effective as it can resolve mass deposition with a resolution in the zeptogram range; on the other hand, this method is simple to use and readily available to a wide range of potential users because it can be operated in existing commercial FEBID systems without making any modification. The presented method allows one to engineer hybrid nanomechanical resonators with precisely tailored functionalities. It also appears as a new tool for studying the growth dynamics of ultrathin nanostructures, opening new opportunities for investigating so far out-of-reach physics of FEBID and related methods.

Idioma: Inglés

DOI: 10.1021/acs.nanolett.9b02351

Año: 2019

Publicado en: Nano Letters 19, 10 (2019), 6987-6992
ISSN: 1530-6984

Factor impacto JCR: 11.238 (2019)

Categ. JCR: CHEMISTRY, PHYSICAL rank: 18 / 159 = 0.113 (2019) - Q1 - T1
Categ. JCR: MATERIALS SCIENCE, MULTIDISCIPLINARY rank: 25 / 314 = 0.08 (2019) - Q1 - T1
Categ. JCR: NANOSCIENCE & NANOTECHNOLOGY rank: 14 / 103 = 0.136 (2019) - Q1 - T1
Categ. JCR: PHYSICS, CONDENSED MATTER rank: 8 / 69 = 0.116 (2019) - Q1 - T1
Categ. JCR: CHEMISTRY, MULTIDISCIPLINARY rank: 19 / 177 = 0.107 (2019) - Q1 - T1
Categ. JCR: PHYSICS, APPLIED rank: 11 / 154 = 0.071 (2019) - Q1 - T1

Factor impacto SCIMAGO: 5.786 - Bioengineering (Q1) - Chemistry (miscellaneous) (Q1) - Nanoscience and Nanotechnology (Q1) - Materials Science (miscellaneous) (Q1) - Mechanical Engineering (Q1) - Condensed Matter Physics (Q1)

Financiación: info:eu-repo/grantAgreement/ES/DGA/E13-17R
Financiación: info:eu-repo/grantAgreement/EC/H2020/692876/EU/Nanotube Mechanical Resonator, Spin, and Superfluidity/NaTuRe
Financiación: info:eu-repo/grantAgreement/EC/H2020/758794/EU/Quantum optomechanics at ROOm Temperature/Q-ROOT
Financiación: info:eu-repo/grantAgreement/EC/H2020/862149/EU/Room Temperature Magnetic Resonance Force Microscopy/RTMFRM
Financiación: info:eu-repo/grantAgreement/ES/MINECO/FIS2015-69831-P
Financiación: info:eu-repo/grantAgreement/ES/MINECO/MAT2017-82970-C2-1-R
Financiación: info:eu-repo/grantAgreement/ES/MINECO/MAT2017-82970-C2-2-R
Financiación: info:eu-repo/grantAgreement/ES/MINECO/RTI2018-097953-B-I00
Financiación: info:eu-repo/grantAgreement/ES/MINECO/SEV-2015-0522

Tipo y forma: Artículo (Versión definitiva)

Área (Departamento): Área Física Materia Condensada (Dpto. Física Materia Condensa.)