000087522 001__ 87522
000087522 005__ 20210520140811.0
000087522 037__ $$aTESIS-2020-034
000087522 041__ $$aeng
000087522 1001_ $$aDíaz Pérez, Lucía Candela
000087522 24500 $$aPositioning Control System for a Large Range 2D Platform with Submicrometre Accuracy for Metrological and Manufacturing Applications
000087522 260__ $$aZaragoza$$bUniversidad de Zaragoza, Prensas de la Universidad$$c2019
000087522 300__ $$a208
000087522 4900_ $$aTesis de la Universidad de Zaragoza$$v2020-34$$x2254-7606
000087522 500__ $$aPresentado: 18 11 2019
000087522 502__ $$aTesis-Univ. Zaragoza, Ingeniería de Diseño y Fabricación, 2019$$bZaragoza, Universidad de Zaragoza$$c2019
000087522 506__ $$aby$$bCreative Commons$$c3.0$$uhttp://creativecommons.org/licenses/by/3.0/es
000087522 520__ $$aThe importance of nanotechnology in the world of Science and Technology has rapidly increased over recent decades, demanding positioning systems capable of providing accurate positioning in large working ranges. In this line of research, a nanopositioning platform, the NanoPla, has been developed at the University of Zaragoza. The NanoPla has a large working range of 50 mm × 50 mm and submicrometre accuracy. The NanoPla actuators are four Halbach linear motors and it implements planar motion. In addition, a 2D plane mirror laser interferometer system works as positioning sensor. One of the targets of the NanoPla is to implement commercial devices when possible. Therefore, a commercial control hardware designed for generic three phase motors has been selected to control and drive the Halbach linear motors.<br />This thesis develops 2D positioning control strategy for large range accurate positioning systems and implements it in the NanoPla. The developed control system coordinates the performance of the four Halbach linear motors and integrates the 2D laser system positioning feedback. In order to improve the positioning accuracy, a self calibration procedure for the characterisation of the geometrical errors of the 2D laser system is proposed. The contributors to the final NanoPla positioning errors are analysed and the final positioning uncertainty (k=2) of the 2D control system is calculated to be ±0.5 µm. The resultant uncertainty is much lower than the NanoPla required positioning accuracy, broadening its applicability scope.<br />
000087522 520__ $$a<br />
000087522 521__ $$97099$$aPrograma de Doctorado en Ingeniería de Diseño y Fabricación
000087522 6531_ $$ametrologia
000087522 6531_ $$asistemas de control
000087522 700__ $$aAlbajez García, José Antonio$$edir.
000087522 700__ $$aYagüe Fabra, José Antonio$$edir.
000087522 7102_ $$aUniversidad de Zaragoza$$bIngeniería de Diseño y Fabricación
000087522 830__ $$9511
000087522 8560_ $$ftdr@unizar.es
000087522 8564_ $$s19938687$$uhttps://zaguan.unizar.es/record/87522/files/TESIS-2020-034.pdf$$zTexto completo (eng)
000087522 909CO $$ooai:zaguan.unizar.es:87522$$pdriver
000087522 909co $$ptesis
000087522 9102_ $$a$$bIngeniería de Diseño y Fabricación
000087522 980__ $$aTESIS