000089273 001__ 89273
000089273 005__ 20210902121642.0
000089273 0247_ $$2doi$$a10.3390/mi11020211
000089273 0248_ $$2sideral$$a117537
000089273 037__ $$aART-2020-117537
000089273 041__ $$aeng
000089273 100__ $$0(orcid)0000-0001-9566-0738$$aDe Teresa, José María$$uUniversidad de Zaragoza
000089273 245__ $$aErratum: De Teresa, J.M. et al. Comparison between Focused Electron/Ion Beam-Induced Deposition at Room Temperature and under Cryogenic Conditions. Micromachines 2019, 10, 799
000089273 260__ $$c2020
000089273 5060_ $$aAccess copy available to the general public$$fUnrestricted
000089273 5203_ $$aErratum of Micromachines 2019, 10(12), 799: In Section 3.1 (page 4) on the fourth line, it says “C/cm2”. It should be changed to “uC/cm2”.
000089273 540__ $$9info:eu-repo/semantics/openAccess$$aby$$uhttp://creativecommons.org/licenses/by/3.0/es/
000089273 590__ $$a2.891$$b2020
000089273 591__ $$aINSTRUMENTS & INSTRUMENTATION$$b23 / 64 = 0.359$$c2020$$dQ2$$eT2
000089273 591__ $$aPHYSICS, APPLIED$$b69 / 160 = 0.431$$c2020$$dQ2$$eT2
000089273 591__ $$aNANOSCIENCE & NANOTECHNOLOGY$$b76 / 106 = 0.717$$c2020$$dQ3$$eT3
000089273 591__ $$aCHEMISTRY, ANALYTICAL$$b46 / 83 = 0.554$$c2020$$dQ3$$eT2
000089273 592__ $$a0.574$$b2020
000089273 593__ $$aControl and Systems Engineering$$c2020$$dQ2
000089273 593__ $$aMechanical Engineering$$c2020$$dQ2
000089273 593__ $$aElectrical and Electronic Engineering$$c2020$$dQ2
000089273 655_4 $$ainfo:eu-repo/semantics/other$$vinfo:eu-repo/semantics/publishedVersion
000089273 700__ $$0(orcid)0000-0002-6087-7467$$aOrús, Pablo
000089273 700__ $$aCordoba, Rosa
000089273 700__ $$aPhilipp, Patrick
000089273 7102_ $$12003$$2395$$aUniversidad de Zaragoza$$bDpto. Física Materia Condensa.$$cÁrea Física Materia Condensada
000089273 773__ $$g11, 2 (2020), 211 [1 pp.]$$pMicromachines (Basel)$$tMICROMACHINES$$x2072-666X
000089273 8564_ $$s190542$$uhttps://zaguan.unizar.es/record/89273/files/texto_completo.pdf$$yVersión publicada
000089273 8564_ $$s286406$$uhttps://zaguan.unizar.es/record/89273/files/texto_completo.jpg?subformat=icon$$xicon$$yVersión publicada
000089273 909CO $$ooai:zaguan.unizar.es:89273$$particulos$$pdriver
000089273 951__ $$a2021-09-02-09:01:18
000089273 980__ $$aARTICLE