000101528 001__ 101528
000101528 005__ 20220425105232.0
000101528 0247_ $$2doi$$a10.1063/1.5141154
000101528 0248_ $$2sideral$$a117803
000101528 037__ $$aART-2020-117803
000101528 041__ $$aeng
000101528 100__ $$aFerreiro-Vila, Elías
000101528 245__ $$aTopotactic transformation in SrFeO3- d triggered by low-dose Ga+ focused ion irradiation
000101528 260__ $$c2020
000101528 5060_ $$aAccess copy available to the general public$$fUnrestricted
000101528 5203_ $$aWe introduce a single-step lithography process based on Ga+-focused ion beam (FIB) irradiation to trigger a topotactic transformation on SrFeO3-d thin films, from the perovskite to the brownmillerite (BM) crystal structure. The crystallographic transformation is triggered by preferential oxygen sputtering by Ga+-FIB irradiation, which favors the formation of the SrFeO2.5 BM phase. The transformation has been verified through micro-Raman spectroscopy on thin films subjected to Ga+-FIB irradiation under 5 kV and 30 kV. Inducing crystallographic transformations by FIB in a single-step process (without the need of resists), at a very high speed (low Ga+ doses are required, in the range of 1015 ions/cm2), with very high spatial resolution (limited by the ion beam spot, of a few square nanometers) and with potential for upscaling using broad Ga+ beams, this approach represents a significant forward step over previous methods using multistep lithographic or electrochemical procedures. All these virtues make this process appealing to develop applications based not only on SrFeO3-d thin films but also on other oxide films harnessing topotactic transformations.
000101528 536__ $$9info:eu-repo/grantAgreement/ES/DGA/E13-20R$$9info:eu-repo/grantAgreement/EC/H2020/734187/EU/Spin conversion, logic storage in oxide-based electronics/SPICOLOST$$9This project has received funding from the European Union’s Horizon 2020 research and innovation program under grant agreement No H2020 734187-SPICOLOST$$9info:eu-repo/grantAgreement/ES/MINECO/MAT2016-80762-R$$9info:eu-repo/grantAgreement/ES/MINECO/MAT2017-82970-C2-2-R$$9info:eu-repo/grantAgreement/ES/MINECO/MAT2018-102627-T
000101528 540__ $$9info:eu-repo/semantics/openAccess$$aby$$uhttp://creativecommons.org/licenses/by/3.0/es/
000101528 590__ $$a3.791$$b2020
000101528 591__ $$aPHYSICS, APPLIED$$b47 / 160 = 0.294$$c2020$$dQ2$$eT1
000101528 592__ $$a1.181$$b2020
000101528 593__ $$aPhysics and Astronomy (miscellaneous)$$c2020$$dQ1
000101528 655_4 $$ainfo:eu-repo/semantics/article$$vinfo:eu-repo/semantics/publishedVersion
000101528 700__ $$aBugallo, David
000101528 700__ $$0(orcid)0000-0002-6761-6171$$aMagén, César$$uUniversidad de Zaragoza
000101528 700__ $$aRivadulla, Francisco
000101528 700__ $$0(orcid)0000-0001-9566-0738$$aDe Teresa, José María$$uUniversidad de Zaragoza
000101528 7102_ $$12003$$2395$$aUniversidad de Zaragoza$$bDpto. Física Materia Condensa.$$cÁrea Física Materia Condensada
000101528 773__ $$g116, 16 (2020), 163103 [1-5 pp.]$$pAppl. phys. lett.$$tApplied Physics Letters$$x0003-6951
000101528 8564_ $$s2126865$$uhttps://zaguan.unizar.es/record/101528/files/texto_completo.pdf$$yVersión publicada
000101528 8564_ $$s1249980$$uhttps://zaguan.unizar.es/record/101528/files/texto_completo.jpg?subformat=icon$$xicon$$yVersión publicada
000101528 909CO $$ooai:zaguan.unizar.es:101528$$particulos$$pdriver
000101528 951__ $$a2022-04-25-10:37:09
000101528 980__ $$aARTICLE