doi:10.1063/1.5141154engFerreiro-Vila, ElíasBugallo, DavidMagén, CésarRivadulla, FranciscoDe Teresa, José MaríaTopotactic transformation in SrFeO3- d triggered by low-dose Ga+ focused ion irradiationART-2020-117803We introduce a single-step lithography process based on Ga+-focused ion beam (FIB) irradiation to trigger a topotactic transformation on SrFeO3-d thin films, from the perovskite to the brownmillerite (BM) crystal structure. The crystallographic transformation is triggered by preferential oxygen sputtering by Ga+-FIB irradiation, which favors the formation of the SrFeO2.5 BM phase. The transformation has been verified through micro-Raman spectroscopy on thin films subjected to Ga+-FIB irradiation under 5 kV and 30 kV. Inducing crystallographic transformations by FIB in a single-step process (without the need of resists), at a very high speed (low Ga+ doses are required, in the range of 1015 ions/cm2), with very high spatial resolution (limited by the ion beam spot, of a few square nanometers) and with potential for upscaling using broad Ga+ beams, this approach represents a significant forward step over previous methods using multistep lithographic or electrochemical procedures. All these virtues make this process appealing to develop applications based not only on SrFeO3-d thin films but also on other oxide films harnessing topotactic transformations.2020http://zaguan.unizar.es/record/10152810.1063/1.5141154http://zaguan.unizar.es/record/101528oai:zaguan.unizar.es:101528info:eu-repo/grantAgreement/ES/DGA/E13-20Rinfo:eu-repo/grantAgreement/EC/H2020/734187/EU/Spin conversion, logic storage in oxide-based electronics/SPICOLOSTThis project has received funding from the European Union’s Horizon 2020 research and innovation program under grant agreement No H2020 734187-SPICOLOSTinfo:eu-repo/grantAgreement/ES/MINECO/MAT2016-80762-Rinfo:eu-repo/grantAgreement/ES/MINECO/MAT2017-82970-C2-2-Rinfo:eu-repo/grantAgreement/ES/MINECO/MAT2018-102627-TApplied Physics Letters 116, 16 (2020), 163103 [1-5 pp.]byhttp://creativecommons.org/licenses/by/3.0/es/info:eu-repo/semantics/openAccess