101528 20220425105232.0 doi 10.1063/1.5141154 sideral 117803 ART-2020-117803 eng Ferreiro-Vila, Elías Topotactic transformation in SrFeO3- d triggered by low-dose Ga+ focused ion irradiation 2020 Access copy available to the general public Unrestricted We introduce a single-step lithography process based on Ga+-focused ion beam (FIB) irradiation to trigger a topotactic transformation on SrFeO3-d thin films, from the perovskite to the brownmillerite (BM) crystal structure. The crystallographic transformation is triggered by preferential oxygen sputtering by Ga+-FIB irradiation, which favors the formation of the SrFeO2.5 BM phase. The transformation has been verified through micro-Raman spectroscopy on thin films subjected to Ga+-FIB irradiation under 5 kV and 30 kV. Inducing crystallographic transformations by FIB in a single-step process (without the need of resists), at a very high speed (low Ga+ doses are required, in the range of 1015 ions/cm2), with very high spatial resolution (limited by the ion beam spot, of a few square nanometers) and with potential for upscaling using broad Ga+ beams, this approach represents a significant forward step over previous methods using multistep lithographic or electrochemical procedures. All these virtues make this process appealing to develop applications based not only on SrFeO3-d thin films but also on other oxide films harnessing topotactic transformations. info:eu-repo/grantAgreement/ES/DGA/E13-20R info:eu-repo/grantAgreement/EC/H2020/734187/EU/Spin conversion, logic storage in oxide-based electronics/SPICOLOST This project has received funding from the European Union’s Horizon 2020 research and innovation program under grant agreement No H2020 734187-SPICOLOST info:eu-repo/grantAgreement/ES/MINECO/MAT2016-80762-R info:eu-repo/grantAgreement/ES/MINECO/MAT2017-82970-C2-2-R info:eu-repo/grantAgreement/ES/MINECO/MAT2018-102627-T info:eu-repo/semantics/openAccess by http://creativecommons.org/licenses/by/3.0/es/ 3.791 2020 PHYSICS, APPLIED 47 / 160 = 0.294 2020 Q2 T1 1.181 2020 Physics and Astronomy (miscellaneous) 2020 Q1 info:eu-repo/semantics/article info:eu-repo/semantics/publishedVersion Bugallo, David Magén, César Universidad de Zaragoza (orcid)0000-0002-6761-6171 Rivadulla, Francisco De Teresa, José María Universidad de Zaragoza (orcid)0000-0001-9566-0738 2003 395 Universidad de Zaragoza Dpto. Física Materia Condensa. Área Física Materia Condensada 116, 16 (2020), 163103 [1-5 pp.] Appl. phys. lett. Applied Physics Letters 0003-6951 2126865 http://zaguan.unizar.es/record/101528/files/texto_completo.pdf Versión publicada 1249980 http://zaguan.unizar.es/record/101528/files/texto_completo.jpg?subformat=icon icon Versión publicada oai:zaguan.unizar.es:101528 articulos driver 2022-04-25-10:37:09 ARTICLE