108378 20230519145428.0 doi 10.1039/d1na00580d sideral 124952 ART-2021-124952 eng Salvador-Porroche A. (orcid)0000-0003-2517-9468 Highly-efficient growth of cobalt nanostructures using focused ion beam induced deposition under cryogenic conditions: Application to electrical contacts on graphene, magnetism and hard masking 2021 Access copy available to the general public Unrestricted Emergent technologies are required in the field of nanoelectronics for improved contacts and interconnects at nano and micro-scale. In this work, we report a highly-efficient nanolithography process for the growth of cobalt nanostructures requiring an ultra-low charge dose (15 µC cm-2, unprecedented in single-step charge-based nanopatterning). This resist-free process consists in the condensation of a ~28 nm-thick Co2(CO)8 layer on a substrate held at -100 °C, its irradiation with a Ga+ focused ion beam, and substrate heating up to room temperature. The resulting cobalt-based deposits exhibit sub-100 nm lateral resolution, display metallic behaviour (room-temperature resistivity of 200 µO cm), present ferromagnetic properties (magnetization at room temperature of 400 emu cm-3) and can be grown in large areas. To put these results in perspective, similar properties can be achieved by room-temperature focused ion beam induced deposition and the same precursor only if a 2 × 103 times higher charge dose is used. We demonstrate the application of such an ultra-fast growth process to directly create electrical contacts onto graphene ribbons, opening the route for a broad application of this technology to any 2D material. In addition, the application of these cryo-deposits for hard masking is demonstrated, confirming its structural functionality. This journal is © The Royal Society of Chemistry. info:eu-repo/grantAgreement/EUR/COST/CA19140 FIT4NANO info:eu-repo/grantAgreement/ES/CSIC/PIE-202060E187 info:eu-repo/grantAgreement/ES/CSIC/PTI-001 info:eu-repo/grantAgreement/ES/DGA/E31-20R info:eu-repo/grantAgreement/ES/MCIU/MAT2017-82970-C2-2-R info:eu-repo/grantAgreement/ES/MCIU/PID2019-105881RB-I00 info:eu-repo/grantAgreement/ES/MCIU/PID2020-112914RB-I00 info:eu-repo/grantAgreement/ES/MINECO/MAT2018-102627-T info:eu-repo/semantics/openAccess by http://creativecommons.org/licenses/by/3.0/es/ 5.598 2021 CHEMISTRY, MULTIDISCIPLINARY 56 / 180 = 0.311 2021 Q2 T1 MATERIALS SCIENCE, MULTIDISCIPLINARY 111 / 345 = 0.322 2021 Q2 T1 NANOSCIENCE & NANOTECHNOLOGY 55 / 109 = 0.505 2021 Q3 T2 1.043 2021 Atomic and Molecular Physics, and Optics 2021 Q1 Materials Science (miscellaneous) 2021 Q1 Engineering (miscellaneous) 2021 Q1 Bioengineering 2021 Q1 5.7 2021 info:eu-repo/semantics/article info:eu-repo/semantics/publishedVersion Sangiao S. Universidad de Zaragoza (orcid)0000-0002-4123-487X Magén C. Universidad de Zaragoza (orcid)0000-0002-6761-6171 Barrado M. Philipp P. Belotcerkovtceva D. Kamalakar M.V. Cea P. Universidad de Zaragoza (orcid)0000-0002-4729-9578 Teresa J.M. de Universidad de Zaragoza (orcid)0000-0001-9566-0738 2012 755 Universidad de Zaragoza Dpto. Química Física Área Química Física 2003 395 Universidad de Zaragoza Dpto. Física Materia Condensa. Área Física Materia Condensada 3, 19 (2021), 5656-5662 Nanoscale Advances 2516-0230 752340 http://zaguan.unizar.es/record/108378/files/texto_completo.pdf Versión publicada 2763342 http://zaguan.unizar.es/record/108378/files/texto_completo.jpg?subformat=icon icon Versión publicada oai:zaguan.unizar.es:108378 articulos driver 2023-05-18-14:15:52 ARTICLE