109425 20230519145514.0 doi 10.3390/s21093117 sideral 125355 ART-2021-125355 eng Martínez, Javier (orcid)0000-0003-1562-4433 Lightweight thermal compensation technique for MEMS capacitive accelerometer oriented to quasi-static measurements 2021 Access copy available to the general public Unrestricted The application of MEMS capacitive accelerometers is limited by its thermal dependence, and each accelerometer must be individually calibrated to improve its performance. In this work, a light calibration method based on theoretical studies is proposed to obtain two characteristic parameters of the sensor’s operation: the temperature drift of bias and the temperature drift of scale factor. This method requires less data to obtain the characteristic parameters, allowing a faster calibration. Furthermore, using an equation with fewer parameters reduces the computational cost of compensation. After studying six accelerometers, model LIS3DSH, their characteristic parameters are obtained in a temperature range between 15 °C and 55 °C. It is observed that the Temperature Drift of Bias (TDB) is the parameter with the greatest influence on thermal drift, reaching 1.3 mg/°C. The Temperature Drift of Scale Factor (TDSF) is always negative and ranges between 0 and −400 ppm/°C. With these parameters, the thermal drifts are compensated in tests with 20 °C of thermal variation. An average improvement of 47% was observed. In the axes where the thermal drift was greater than 1 mg/°C, the improvement was greater than 80%. Other sensor behaviors have also been analyzed, such as temporal drift (up to 1 mg/h for three hours) and self-heating (2–3 °C in the first hours with the corresponding drift). Thermal compensation has been found to reduce the effect of the latter in the first hours after power-up of the sensor by 43%. info:eu-repo/semantics/openAccess by http://creativecommons.org/licenses/by/3.0/es/ 3.847 2021 CHEMISTRY, ANALYTICAL 29 / 87 = 0.333 2021 Q2 T2 INSTRUMENTS & INSTRUMENTATION 19 / 64 = 0.297 2021 Q2 T1 ENGINEERING, ELECTRICAL & ELECTRONIC 95 / 277 = 0.343 2021 Q2 T2 0.803 2021 Analytical Chemistry 2021 Q1 Biochemistry 2021 Q1 Instrumentation 2021 Q1 Information Systems 2021 Q1 Electrical and Electronic Engineering 2021 Q1 6.4 2021 info:eu-repo/semantics/article info:eu-repo/semantics/publishedVersion Asiain, David (orcid)0000-0003-3618-4940 Beltrán, José Ramón Universidad de Zaragoza (orcid)0000-0002-7500-4650 5008 785 Universidad de Zaragoza Dpto. Ingeniería Electrón.Com. Área Tecnología Electrónica 21, 9 (2021), 3117 [23 pp.] Sensors Sensors 1424-8220 18438308 http://zaguan.unizar.es/record/109425/files/texto_completo.pdf Versión publicada 2683999 http://zaguan.unizar.es/record/109425/files/texto_completo.jpg?subformat=icon icon Versión publicada oai:zaguan.unizar.es:109425 articulos driver 2023-05-18-15:14:11 ARTICLE