000109604 001__ 109604
000109604 005__ 20220208123553.0
000109604 0247_ $$2doi$$a10.17533/udea.redin.20200693
000109604 0248_ $$2sideral$$a125569
000109604 037__ $$aART-2020-125569
000109604 041__ $$aeng
000109604 100__ $$aRodríguez-Castro, Leidys Marleyn
000109604 245__ $$aInfluence of boehmite intermediate layer as covalent linker on synthesis of LTA zeolite coatings
000109604 260__ $$c2020
000109604 5060_ $$aAccess copy available to the general public$$fUnrestricted
000109604 5203_ $$aThe incorporation of nanostructured materials, such as LTA-type zeolite on the silicon wafers, opens a very interesting door to the use of these materials within silicon based microfabrication technologies. This work studies the deposition and intergrowth of defect-free LTA-type zeolite layer onto 3-inch Silicon wafers with a layer of SiO2 subjected to pretreatment. The main disadvantage associated with zeolite layer synthesis are crack the formation of cracks and difficulty of obtaining a uniform layer. By modifying the supports with boehmite, a substantial improvement was observed in terms of layer continuity and crystal intergrowth in comparrison to coatings prepared on cationic polymer, poly (diallyldimethylammonium chloride). An LTA- type zeolite layer was synthesized in a range of 350 to 1300 nm via hydrothermal ex-situ method at 363 K for 12 h. Tetramethylammonium hydroxide (TMAOH) was used as a template, and aluminum isopropoxide and colloidal silica were used as Al and Si sources, respectively.
000109604 540__ $$9info:eu-repo/semantics/openAccess$$aby-nc-sa$$uhttp://creativecommons.org/licenses/by-nc-sa/3.0/es/
000109604 592__ $$a0.16$$b2020
000109604 593__ $$aEngineering (miscellaneous)$$c2020$$dQ4
000109604 655_4 $$ainfo:eu-repo/semantics/article$$vinfo:eu-repo/semantics/publishedVersion
000109604 700__ $$aUrbiztondo-Castro, Miguel Angel
000109604 700__ $$0(orcid)0000-0001-9897-6527$$aPina-Iritia, Maria Pilar$$uUniversidad de Zaragoza
000109604 7102_ $$15005$$2555$$aUniversidad de Zaragoza$$bDpto. Ing.Quím.Tecnol.Med.Amb.$$cÁrea Ingeniería Química
000109604 773__ $$g101 (2020), 64-73$$pRev. fac. ing. univ. antioq. (Medellín)$$tRevista Facultad de Ingenieria-Universidad de Antioquia$$x0120-6230
000109604 8564_ $$s427574$$uhttps://zaguan.unizar.es/record/109604/files/texto_completo.pdf$$yVersión publicada
000109604 8564_ $$s2668866$$uhttps://zaguan.unizar.es/record/109604/files/texto_completo.jpg?subformat=icon$$xicon$$yVersión publicada
000109604 909CO $$ooai:zaguan.unizar.es:109604$$particulos$$pdriver
000109604 951__ $$a2022-02-08-11:19:46
000109604 980__ $$aARTICLE