doi:10.1021/acsnano.0c10014engYoo D.Barik A.León-Pérez F.Mohr D.A.Pelton M.Martín-Moreno L.Oh S.-H.Plasmonic Split-Trench Resonator for Trapping and SensingART-2021-125654On-chip integration of plasmonics and electronics can benefit a broad range of applications in biosensing, signal processing, and optoelectronics. A key requirement is a chip-scale manufacturing method. Here, we demonstrate a split-trench resonator platform that combines a high-quality-factor resonant plasmonic biosensor with radio frequency (RF) nanogap tweezers. The split-trench resonator can simultaneously serve as a dielectrophoretic trap and a nanoplasmonic sensor. Trapping is accomplished by applying an RF electrical bias across a 10 nm gap, thereby either attracting or repelling analytes. Trapped analytes are detected in a label-free manner using refractive-index sensing, enabled by interference between surface-plasmon standing waves in the trench and light transmitted through the gap. This active sample concentration mechanism enables detection of nanoparticles and proteins at a concentration as low as 10 pM. We can manufacture centimeter-long split-trench cavity resonators with high throughput via photolithography and atomic layer deposition, toward practical applications in biosensing, spectroscopy, and optoelectronics. © 2021 American Chemical Society.2021http://zaguan.unizar.es/record/11207010.1021/acsnano.0c10014http://zaguan.unizar.es/record/112070oai:zaguan.unizar.es:112070info:eu-repo/grantAgreement/ES/MINECO/MAT2017-88358-C3-1-Rinfo:eu-repo/grantAgreement/ES/MINECO/MAT2017-88358-C3-2-RACS NANO 15, 4 (2021), 6669-6677byhttp://creativecommons.org/licenses/by/3.0/es/info:eu-repo/semantics/openAccess