000116533 001__ 116533 000116533 005__ 20220606153145.0 000116533 037__ $$aGDOC-2021-66116 000116533 041__ $$aspa 000116533 041__ $$aeng 000116533 100__ $$0(orcid)0000-0003-3165-0156$$1308425$$aManuel Arruebo, Gordo 000116533 24500 $$966116$$aFabricación de micro y nanodispositivos 000116533 24200 $$966116$$aFabrication of Micro and Nanodevices 000116533 260__ $$aZaragoza$$bUniversidad de Zaragoza$$c2021-2022 000116533 521__ $$9637$$aMáster Universitario en Materiales Nanoestructurados para Aplicaciones Nanotecnológicas$$bMaster's in Nanostructured Materials for Nanotechnology Applications 000116533 540__ $$aby-nc-sa$$bCreative Commons$$c3.0$$uhttp://creativecommons.org/licenses/by-nc-sa/3.0/ 000116533 700__ $$0(orcid)0000-0003-2800-6845$$1773061$$aMaría Bernechea, Navarro 000116533 700__ $$0(orcid)0000-0002-4729-9578$$1302689$$aPilar Cea, Mingueza 000116533 700__ $$0(orcid)0000-0001-6040-1920$$1803365$$aEmilio José Juárez, Pérez 000116533 700__ $$0(orcid)0000-0002-7902-6005$$1383518$$aSusana de Marcos, Ruiz 000116533 700__ $$0(orcid)0000-0003-0602-492X$$1118994$$aClara Isabel Marquina, Garcia 000116533 700__ $$0(orcid)0000-0001-9897-6527$$1326791$$aMaría Pilar Pina, Iritia 000116533 700__ $$0(orcid)0000-0002-6873-5244$$1437168$$aVictor Sebastián, Cabeza 000116533 700__ $$0(orcid)0000-0002-7742-9329$$1332801$$aJavier Sesé, Monclús 000116533 700__ $$0(orcid)0000-0003-4599-796X$$1387306$$aJuan Carlos Vidal, Ibáñez 000116533 830__ $$9539 000116533 8564_ $$s18075$$uhttps://zaguan.unizar.es/record/116533/files/guia-66116-en.pdf$$yGuide (english) 000116533 970__ $$aGDOC-2021-66116 000116533 980__ $$aGDOC$$bSciences$$bCiencias$$c100