117980 20240319081008.0 doi 10.3390/nano12081367 sideral 129196 ART-2022-129196 eng Orús, P. (orcid)0000-0002-6087-7467 Superconducting materials and devices grown by focused ion and electron beam induced deposition 2022 Access copy available to the general public Unrestricted Since its discovery in 1911, superconductivity has represented an equally inciting and fascinating field of study in several areas of physics and materials science, ranging from its most fundamental theoretical understanding, to its practical application in different areas of engineering. The fabrication of superconducting materials can be downsized to the nanoscale by means of Focused Ion/Electron Beam Induced Deposition: nanopatterning techniques that make use of a focused beam of ions or electrons to decompose a gaseous precursor in a single step. Overcoming the need to use a resist, these approaches allow for targeted, highly-flexible nanopatterning of nanostructures with lateral resolution in the range of 10 nm to 30 nm. In this review, the fundamentals of these nanofabrication techniques are presented, followed by a literature revision on the published work that makes use of them to grow superconducting materials, the most remarkable of which are based on tungsten, niobium, molybdenum, carbon, and lead. Several examples of the application of these materials to functional devices are presented, related to the superconducting proximity effect, vortex dynamics, electric-field effect, and to the nanofabrication of Josephson junctions and nanoSQUIDs. Owing to the patterning flexibility they offer, both of these techniques represent a powerful and convenient approach towards both fundamental and applied research in superconductivity. © 2022 by the authors. Licensee MDPI, Basel, Switzerland. info:eu-repo/grantAgreement/ES/CSIC/PIE-202060E187 info:eu-repo/grantAgreement/ES/CSIC/PTI-001 info:eu-repo/grantAgreement/ES/DGA/E13-20R info:eu-repo/grantAgreement/EC/H2020/892427/EU/Focused Ion Beam fabrication of superconducting scanning Probes/FIBsuperProbes This project has received funding from the European Union’s Horizon 2020 research and innovation program under grant agreement No H2020 892427-FIBsuperProbes info:eu-repo/grantAgreement/ES/MCIU/PID2020-112914RB-I00 info:eu-repo/semantics/openAccess by http://creativecommons.org/licenses/by/3.0/es/ 5.3 2022 PHYSICS, APPLIED 39 / 160 = 0.244 2022 Q1 T1 NANOSCIENCE & NANOTECHNOLOGY 51 / 107 = 0.477 2022 Q2 T2 CHEMISTRY, MULTIDISCIPLINARY 58 / 178 = 0.326 2022 Q2 T1 MATERIALS SCIENCE, MULTIDISCIPLINARY 110 / 343 = 0.321 2022 Q2 T1 0.811 2022 Chemical Engineering (miscellaneous) 2022 Q1 Materials Science (miscellaneous) 2022 Q2 7.4 2022 info:eu-repo/semantics/review info:eu-repo/semantics/publishedVersion Sigloch, F. Sangiao, S. Universidad de Zaragoza (orcid)0000-0002-4123-487X Teresa, J. M. de Universidad de Zaragoza (orcid)0000-0001-9566-0738 2003 395 Universidad de Zaragoza Dpto. Física Materia Condensa. Área Física Materia Condensada 12, 8 (2022), 1367 [29 pp.] Nanomaterials (Basel) Nanomaterials 2079-4991 9609883 http://zaguan.unizar.es/record/117980/files/texto_completo.pdf Versión publicada 2745293 http://zaguan.unizar.es/record/117980/files/texto_completo.jpg?subformat=icon icon Versión publicada oai:zaguan.unizar.es:117980 articulos driver 2024-03-18-14:53:24 ARTICLE