119673 20230519145547.0 doi 10.3390/magnetochemistry7100140 sideral 126526 ART-2021-126526 eng Pablo-Navarro, J. (orcid)0000-0001-6771-6941 Magnetic functionalization of scanning probes by focused electron beam induced deposition technology 2021 Access copy available to the general public Unrestricted The fabrication of nanostructures with high resolution and precise control of the deposition site makes Focused Electron Beam Induced Deposition (FEBID) a unique nanolithography process. In the case of magnetic materials, apart from the FEBID potential in standard substrates for multiple applications in data storage and logic, the use of this technology for the growth of nanomagnets on different types of scanning probes opens new paths in magnetic sensing, becoming a benchmark for magnetic functionalization. This work reviews the recent advances in the integration of FEBID magnetic nanostructures onto cantilevers to produce advanced magnetic sensing devices with unprecedented performance. © 2021 by the authors. Licensee MDPI, Basel, Switzerland. info:eu-repo/grantAgreement/ES/DGA/E13-20R info:eu-repo/grantAgreement/ES/DGA-FEDER/Construyendo Europa desde Aragón info:eu-repo/grantAgreement/EC/H2020/823717/EU/Enabling Science and Technology through European Electron Microscopy/ESTEEM3 This project has received funding from the European Union’s Horizon 2020 research and innovation program under grant agreement No H2020 823717-ESTEEM3 info:eu-repo/grantAgreement/ES/MICINN/BES-2015-072950 info:eu-repo/grantAgreement/ES/MICINN-FEDER/PID2020-112914RB-I00 info:eu-repo/grantAgreement/ES/MICINN/MAT2017-82970-C2-2-R info:eu-repo/grantAgreement/ES/MICINN/MAT2018-102627-T info:eu-repo/semantics/openAccess by http://creativecommons.org/licenses/by/3.0/es/ 3.336 2021 CHEMISTRY, INORGANIC & NUCLEAR 17 / 46 = 0.37 2021 Q2 T2 MATERIALS SCIENCE, MULTIDISCIPLINARY 195 / 345 = 0.565 2021 Q3 T2 CHEMISTRY, PHYSICAL 97 / 165 = 0.588 2021 Q3 T2 0.427 2021 Materials Chemistry 2021 Q2 Chemistry (miscellaneous) 2021 Q2 3.0 2021 info:eu-repo/semantics/article info:eu-repo/semantics/publishedVersion Sangiao, S. Universidad de Zaragoza (orcid)0000-0002-4123-487X Magén, C. Universidad de Zaragoza (orcid)0000-0002-6761-6171 Teresa, J.M. de Universidad de Zaragoza (orcid)0000-0001-9566-0738 2003 395 Universidad de Zaragoza Dpto. Física Materia Condensa. Área Física Materia Condensada 7, 10 (2021), 140 [16 pp] Magnetochemistry Magnetochemistry 2312-7481 7487475 http://zaguan.unizar.es/record/119673/files/texto_completo.pdf Versión publicada 2850099 http://zaguan.unizar.es/record/119673/files/texto_completo.jpg?subformat=icon icon Versión publicada oai:zaguan.unizar.es:119673 articulos driver 2023-05-18-15:46:52 ARTICLE