119968 20240319081023.0 doi 10.1016/j.jssc.2022.123476 sideral 130725 ART-2022-130725 eng Orús, Pablo (orcid)0000-0002-6087-7467 Superconducting W-C nanopillars fabricated by Ga+ focused ion beam induced deposition 2022 Access copy available to the general public Unrestricted Ga+ Focused Ion Beam Induced Deposition (FIBID) is a highly flexible, single-step nanopatterning technique that makes use of a focused beam of Ga+ ions to locally induce the decomposition of a gaseous precursor material. In combination with the W(CO)6 precursor, Ga+ FIBID is known to yield a W–C compound that is superconducting below 4.7 ​K. While most reports on Ga+ FIBID-grown W–C focus on in-plane patterning, we demonstrate here that growth along the vertical direction may also be achieved by successively stacking a series of individual patterns that get deposited on top of each other. The nanopillars obtained following this procedure reach up to 10 ​μm in height, and have an aspect ratio of around 50. They exhibit a 68% of metallic W in terms of atomic content, higher than the 40% detected in their in-plane counterparts, while maintaining the superconducting properties. This approach also opens up the possibility of tuning their height and growth angle with respect to the substrate, exhibiting potential applicability in the design of 3D superconducting devices. info:eu-repo/grantAgreement/ES/CSIC/PIE-202060E187 info:eu-repo/grantAgreement/ES/CSIC/PTI-001 info:eu-repo/grantAgreement/ES/DGA/E13-20R info:eu-repo/grantAgreement/EC/H2020/892427/EU/Focused Ion Beam fabrication of superconducting scanning Probes/FIBsuperProbes This project has received funding from the European Union’s Horizon 2020 research and innovation program under grant agreement No H2020 892427-FIBsuperProbes info:eu-repo/grantAgreement/ES/MICINN-FEDER/PID2020-112914RB-I00 info:eu-repo/semantics/openAccess by http://creativecommons.org/licenses/by/3.0/es/ 3.3 2022 CHEMISTRY, INORGANIC & NUCLEAR 13 / 42 = 0.31 2022 Q2 T1 CHEMISTRY, PHYSICAL 88 / 161 = 0.547 2022 Q3 T2 0.58 2022 Ceramics and Composites 2022 Q2 Condensed Matter Physics 2022 Q2 Physical and Theoretical Chemistry 2022 Q2 Inorganic Chemistry 2022 Q2 Materials Chemistry 2022 Q2 Electronic, Optical and Magnetic Materials 2022 Q2 5.6 2022 info:eu-repo/semantics/article info:eu-repo/semantics/publishedVersion Sigloch, Fabian Sangiao, Soraya Universidad de Zaragoza (orcid)0000-0002-4123-487X De Teresa, José María Universidad de Zaragoza (orcid)0000-0001-9566-0738 2003 395 Universidad de Zaragoza Dpto. Física Materia Condensa. Área Física Materia Condensada 315 (2022), 123476 [7 pp.] J. solid state chem. JOURNAL OF SOLID STATE CHEMISTRY 0022-4596 2423238 http://zaguan.unizar.es/record/119968/files/texto_completo.pdf Versión publicada 2678253 http://zaguan.unizar.es/record/119968/files/texto_completo.jpg?subformat=icon icon Versión publicada oai:zaguan.unizar.es:119968 articulos driver 2024-03-18-16:28:36 ARTICLE