000120173 001__ 120173 000120173 005__ 20240319081013.0 000120173 0247_ $$2doi$$a10.3390/nano12152710 000120173 0248_ $$2sideral$$a131210 000120173 037__ $$aART-2022-131210 000120173 041__ $$aeng 000120173 100__ $$aJurczyk, Jakub 000120173 245__ $$aIn Situ Time-of-Flight Mass Spectrometry of Ionic Fragments Induced by Focused Electron Beam Irradiation: Investigation of Electron Driven Surface Chemistry inside an SEM under High Vacuum 000120173 260__ $$c2022 000120173 5060_ $$aAccess copy available to the general public$$fUnrestricted 000120173 5203_ $$aRecent developments in nanoprinting using focused electron beams have created a need to develop analysis methods for the products of electron-induced fragmentation of different metalorganic compounds. The original approach used here is termed focused-electron-beam-induced mass spectrometry (FEBiMS). FEBiMS enables the investigation of the fragmentation of electron-sensitive materials during irradiation within the typical primary electron beam energy range of a scanning electron microscope (0.5 to 30 keV) and high vacuum range. The method combines a typical scanning electron microscope with an ion-extractor-coupled mass spectrometer setup collecting the charged fragments generated by the focused electron beam when impinging on the substrate material. The FEBiMS of fragments obtained during 10 keV electron irradiation of grains of silver and copper carboxylates and shows that the carboxylate ligand dissociates into many smaller volatile fragments. Furthermore, in situ FEBiMS was performed on carbonyls of ruthenium (solid) and during electron-beam-induced deposition, using tungsten carbonyl (inserted via a gas injection system). Loss of carbonyl ligands was identified as the main channel of dissociation for electron irradiation of these carbonyl compounds. The presented results clearly indicate that FEBiMS analysis can be expanded to organic, inorganic, and metal organic materials used in resist lithography, ice (cryo-)lithography, and focused-electron-beam-induced deposition and becomes, thus, a valuable versatile analysis tool to study both fundamental and process parameters in these nanotechnology fields. 000120173 536__ $$9info:eu-repo/grantAgreement/EC/H2020/722149/EU/Low energy ELEctron driven chemistry for the advantage of emerging NAno-fabrication methods/ELENA$$9This project has received funding from the European Union’s Horizon 2020 research and innovation program under grant agreement No H2020 722149-ELENA$$9info:eu-repo/grantAgreement/EC/H2020/872494/EU/Irradiation driven nanofabrication: computational modelling versus experiment/RADON$$9This project has received funding from the European Union’s Horizon 2020 research and innovation program under grant agreement No H2020 872494-RADON 000120173 540__ $$9info:eu-repo/semantics/openAccess$$aby$$uhttp://creativecommons.org/licenses/by/3.0/es/ 000120173 590__ $$a5.3$$b2022 000120173 592__ $$a0.811$$b2022 000120173 591__ $$aPHYSICS, APPLIED$$b39 / 160 = 0.244$$c2022$$dQ1$$eT1 000120173 593__ $$aChemical Engineering (miscellaneous)$$c2022$$dQ1 000120173 591__ $$aNANOSCIENCE & NANOTECHNOLOGY$$b51 / 107 = 0.477$$c2022$$dQ2$$eT2 000120173 593__ $$aMaterials Science (miscellaneous)$$c2022$$dQ2 000120173 591__ $$aCHEMISTRY, MULTIDISCIPLINARY$$b58 / 178 = 0.326$$c2022$$dQ2$$eT1 000120173 591__ $$aMATERIALS SCIENCE, MULTIDISCIPLINARY$$b110 / 343 = 0.321$$c2022$$dQ2$$eT1 000120173 594__ $$a7.4$$b2022 000120173 655_4 $$ainfo:eu-repo/semantics/article$$vinfo:eu-repo/semantics/publishedVersion 000120173 700__ $$aPillatsch, Lex 000120173 700__ $$aBerger, Luisa 000120173 700__ $$aPriebe, Agnieszka 000120173 700__ $$aMadajska, Katarzyna 000120173 700__ $$aKapusta, Czeslaw 000120173 700__ $$aSzymanska, Iwona B. 000120173 700__ $$aMichler, Johann 000120173 700__ $$aUtke, Ivo 000120173 773__ $$g12, 15 (2022), 2710 [17 pp.]$$pNanomaterials (Basel)$$tNanomaterials$$x2079-4991 000120173 8564_ $$s2330429$$uhttps://zaguan.unizar.es/record/120173/files/texto_completo.pdf$$yVersión publicada 000120173 8564_ $$s2788660$$uhttps://zaguan.unizar.es/record/120173/files/texto_completo.jpg?subformat=icon$$xicon$$yVersión publicada 000120173 909CO $$ooai:zaguan.unizar.es:120173$$particulos$$pdriver 000120173 951__ $$a2024-03-18-15:21:21 000120173 980__ $$aARTICLE