121089 20240319080956.0 doi 10.1039/d2na00602b sideral 131542 ART-2022-131542 eng Sigloch, Fabian Direct-write of tungsten-carbide nanoSQUIDs based on focused ion beam induced deposition 2022 Access copy available to the general public Unrestricted NanoSQUIDs are quantum sensors that excel in detecting a small change in magnetic flux with high sensitivity and high spatial resolution. Here, we employ resist-free direct-write Ga+ Focused Ion Beam Induced Deposition (FIBID) techniques to grow W–C nanoSQUIDs, and we investigate their electrical response to changes in the magnetic flux. Remarkably, FIBID allows the fast (3 min) growth of 700 nm × 300 nm nanoSQUIDs based on narrow nanobridges (50 nm wide) that act as Josephson junctions. Albeit the SQUIDs exhibit a comparatively low modulation depth and obtain a high inductance, the observed transfer coefficient (output voltage to magnetic flux change) is comparable to other SQUIDs (up to 1300 μV/Φ0), which correlates with the high resistivity of W–C in the normal state. We discuss here the potential of this approach to reduce the active area of the nanoSQUIDs to gain spatial resolution as well as their integration on cantilevers for scanning-SQUID applications. info:eu-repo/grantAgreement/EUR/COST/CA19140 FIT4NANO info:eu-repo/grantAgreement/ES/CSIC/PTI-001 info:eu-repo/grantAgreement/ES/DGA-FSE/E13-20R info:eu-repo/grantAgreement/EC/H2020/892427/EU/Focused Ion Beam fabrication of superconducting scanning Probes/FIBsuperProbes This project has received funding from the European Union’s Horizon 2020 research and innovation program under grant agreement No H2020 892427-FIBsuperProbes info:eu-repo/grantAgreement/ES/MICINN-FEDER/PID2020-112914RB-I00 info:eu-repo/semantics/openAccess by http://creativecommons.org/licenses/by/3.0/es/ 4.7 2022 MATERIALS SCIENCE, MULTIDISCIPLINARY 123 / 343 = 0.359 2022 Q2 T2 CHEMISTRY, MULTIDISCIPLINARY 61 / 178 = 0.343 2022 Q2 T2 NANOSCIENCE & NANOTECHNOLOGY 55 / 107 = 0.514 2022 Q3 T2 1.063 2022 Atomic and Molecular Physics, and Optics 2022 Q1 Bioengineering 2022 Q1 Materials Science (miscellaneous) 2022 Q1 Engineering (miscellaneous) 2022 Q1 Chemistry (miscellaneous) 2022 Q1 8.6 2022 info:eu-repo/semantics/article info:eu-repo/semantics/publishedVersion Sangiao, Soraya Universidad de Zaragoza (orcid)0000-0002-4123-487X Orús, Pablo (orcid)0000-0002-6087-7467 de Teresa, José M. Universidad de Zaragoza (orcid)0000-0001-9566-0738 2003 395 Universidad de Zaragoza Dpto. Física Materia Condensa. Área Física Materia Condensada 4, 21 (2022), 4628-4634 Nanoscale Advances 2516-0230 659506 http://zaguan.unizar.es/record/121089/files/texto_completo.pdf Versión publicada 2954608 http://zaguan.unizar.es/record/121089/files/texto_completo.jpg?subformat=icon icon Versión publicada oai:zaguan.unizar.es:121089 articulos driver 2024-03-18-13:41:32 ARTICLE