000121097 001__ 121097
000121097 005__ 20230914083422.0
000121097 0247_ $$2doi$$a10.12688/openreseurope.15000.1
000121097 0248_ $$2sideral$$a131694
000121097 037__ $$aART-2022-131694
000121097 041__ $$aeng
000121097 100__ $$0(orcid)0000-0002-6087-7467$$aOrús, Pablo
000121097 245__ $$aLow-resistivity, high-resolution W-C electrical contacts fabricated by direct-write focused electron beam induced deposition
000121097 260__ $$c2022
000121097 5060_ $$aAccess copy available to the general public$$fUnrestricted
000121097 5203_ $$aBackground: The use of a focused ion beam to decompose a precursor gas and produce a metallic deposit is a widespread nanolithographic technique named focused ion beam induced deposition (FIBID). However, such an approach is unsuitable if the sample under study is sensitive to the somewhat aggressive exposure to the ion beam, which induces the effects of surface amorphization, local milling, and ion implantation, among others. An alternative strategy is that of focused electron beam induced deposition (FEBID), which makes use of a focused electron beam instead, and in general yields deposits with much lower metallic content than their FIBID counterparts. Methods: In this work, we optimize the deposition of tungsten-carbon (W-C) nanowires by FEBID to be used as electrical contacts by assessing the impact of the deposition parameters during growth, evaluating their chemical composition, and investigating their electrical response. Results: Under the optimized irradiation conditions, the samples exhibit a metallic content high enough for them to be utilized for this purpose, showing a room-temperature resistivity of 550 μΩ cm and maintaining their conducting properties down to 2 K. The lateral resolution of such FEBID W-C metallic nanowires is 45 nm. Conclusions: The presented optimized procedure may prove a valuable tool for the fabrication of contacts on samples where the FIBID approach is not advised
000121097 536__ $$9info:eu-repo/grantAgreement/ES/DGA-FSE/E13-20R$$9info:eu-repo/grantAgreement/EC/H2020/892427/EU/Focused Ion Beam fabrication of superconducting scanning Probes/FIBsuperProbes$$9This project has received funding from the European Union’s Horizon 2020 research and innovation program under grant agreement No H2020 892427-FIBsuperProbes$$9info:eu-repo/grantAgreement/ES/MICINN-AEI/PID2020-112914RB-100/AEI/10.13039/501100011033
000121097 540__ $$9info:eu-repo/semantics/openAccess$$aby$$uhttp://creativecommons.org/licenses/by/3.0/es/
000121097 594__ $$a0.8$$b2022
000121097 655_4 $$ainfo:eu-repo/semantics/article$$vinfo:eu-repo/semantics/publishedVersion
000121097 700__ $$aSigloch, Fabian
000121097 700__ $$0(orcid)0000-0002-4123-487X$$aSangiao, Soraya$$uUniversidad de Zaragoza
000121097 700__ $$0(orcid)0000-0001-9566-0738$$aDe Teresa, José María$$uUniversidad de Zaragoza
000121097 7102_ $$12003$$2395$$aUniversidad de Zaragoza$$bDpto. Física Materia Condensa.$$cÁrea Física Materia Condensada
000121097 773__ $$g2 (2022), 102 [12 pp]$$tOpen Research Europe$$x2732-5121
000121097 8564_ $$s2045204$$uhttps://zaguan.unizar.es/record/121097/files/texto_completo.pdf$$yVersión publicada
000121097 8564_ $$s1888312$$uhttps://zaguan.unizar.es/record/121097/files/texto_completo.jpg?subformat=icon$$xicon$$yVersión publicada
000121097 909CO $$ooai:zaguan.unizar.es:121097$$particulos$$pdriver
000121097 951__ $$a2023-09-13-12:03:16
000121097 980__ $$aARTICLE