121156 20240319081013.0 doi 10.1088/1361-6528/ac47cf sideral 128576 ART-2022-128576 eng Salvador-Porroche, Alba Universidad de Zaragoza (orcid)0000-0003-2517-9468 Low-resistivity Pd nanopatterns created by a direct electron beam irradiation process free of post-treatment steps 2022 Access copy available to the general public Unrestricted Abstract The ability to create metallic patterned nanostructures with excellent control of size, shape and spatial orientation is of utmost importance in the construction of next-generation electronic and optical devices as well as in other applications such as (bio)sensors, reactive surfaces for catalysis, etc. Moreover, development of simple, rapid and low-cost fabrication processes of metallic patterned nanostructures is a challenging issue for the incorporation of such devices in real market applications. In this contribution, a direct-write method that results in highly conducting palladium-based nanopatterned structures without the need of applying subsequent curing processes is presented. Spin-coated films of palladium acetate were irradiated with an electron beam to produce palladium nanodeposits (PdNDs) with controlled size, shape and height. The use of different electron doses was investigated and its influence on the PdNDs features determined, namely: (1) thickness of the deposits, (2) atomic percentage of palladium content, (3) oxidation state of palladium in the deposit, (4) morphology of the sample and grain size of the Pd nanocrystals and (5) resistivity. It has been probed that the use of high electron doses, 30000 μC·cm-2 results in the lowest resistivity reported to date for PdNDs, namely 145.1 μΩ·cm, which is only one order of magnitude higher than metallic palladium. This result paves the way for development of simplified lithography processes of nanostructured deposits avoiding subsequent post-treatment steps. info:eu-repo/grantAgreement/ES/CSIC/PTI-001 info:eu-repo/grantAgreement/ES/DGA/E31-20R info:eu-repo/grantAgreement/ES/DGA/LMP33-18 info:eu-repo/grantAgreement/ES/MCIU/MAT2017-82970-C2-2-R info:eu-repo/grantAgreement/ES/MCIU/PID2019-105881RB-I00 info:eu-repo/grantAgreement/ES/MCIU/PID2020-112914RB-I00 info:eu-repo/grantAgreement/ES/MINECO/MAT2018-102627-T info:eu-repo/grantAgreement/ES/MINECO/RED2018-102833-T info:eu-repo/semantics/openAccess by-nc-nd http://creativecommons.org/licenses/by-nc-nd/3.0/es/ 3.5 2022 MATERIALS SCIENCE, MULTIDISCIPLINARY 170 / 343 = 0.496 2022 Q2 T2 PHYSICS, APPLIED 54 / 160 = 0.338 2022 Q2 T2 NANOSCIENCE & NANOTECHNOLOGY 67 / 107 = 0.626 2022 Q3 T2 0.705 2022 Mechanical Engineering 2022 Q1 Chemistry (miscellaneous) 2022 Q2 Electrical and Electronic Engineering 2022 Q2 Nanoscience and Nanotechnology 2022 Q2 Mechanics of Materials 2022 Q2 Bioengineering 2022 Q2 Materials Science (miscellaneous) 2022 Q2 6.7 2022 info:eu-repo/semantics/article info:eu-repo/semantics/acceptedVersion Herrer, Lucia (orcid)0000-0002-3576-5156 Sangiao, Soraya Universidad de Zaragoza (orcid)0000-0002-4123-487X de Teresa, Jose Maria Universidad de Zaragoza (orcid)0000-0001-9566-0738 Cea, Pilar Universidad de Zaragoza (orcid)0000-0002-4729-9578 2012 755 Universidad de Zaragoza Dpto. Química Física Área Química Física 2003 395 Universidad de Zaragoza Dpto. Física Materia Condensa. Área Física Materia Condensada 33, 40 (2022), 405302 [10 pp.] Nanotechnology Nanotechnology 0957-4484 1281181 http://zaguan.unizar.es/record/121156/files/texto_completo.pdf Postprint 1322639 http://zaguan.unizar.es/record/121156/files/texto_completo.jpg?subformat=icon icon Postprint oai:zaguan.unizar.es:121156 articulos driver 2024-03-18-15:23:45 ARTICLE