121403 20241125101127.0 doi 10.1016/j.measurement.2023.112469 sideral 131915 ART-2023-131915 eng Díaz-Pérez, L.C. Universidad de Zaragoza (orcid)0000-0003-3823-7903 Uncertainty budget of a large-range nanopositioning platform based on Monte Carlo simulation 2023 Access copy available to the general public Unrestricted The objective of precision systems design is to obtain machines with very high and totally predictable work-zone accuracies. In already functional systems, where the errors can be measured, this is achieved by error correction and compensation. The aim of this work is to propose an uncertainty budget methodology to obtain the final measuring uncertainty of precise measuring systems, after error compensation. The case study is a nanopositioning platform, referred as NanoPla, with a confocal sensor integrated as measuring instrument. The NanoPla performs precise positioning in a large range of 50 mm × 50 mm, and its target is surface topography characterization, at a submicrometre scale. After performing the uncertainty budget of the NanoPla, Monte Carlo method is used to obtain the final measuring uncertainty along the whole NanoPla working range, considering all the casuistry. By studying the results, the authors are able to propose solutions to minimize the final measuring uncertainty. info:eu-repo/grantAgreement/ES/DGA/T56-20R info:eu-repo/grantAgreement/ES/MICINN/RTI2018-097191-B-I00 info:eu-repo/semantics/openAccess by-nc-nd http://creativecommons.org/licenses/by-nc-nd/3.0/es/ 5.2 2023 ENGINEERING, MULTIDISCIPLINARY 17 / 181 = 0.094 2023 Q1 T1 INSTRUMENTS & INSTRUMENTATION 11 / 76 = 0.145 2023 Q1 T1 1.181 2023 Applied Mathematics 2023 Q1 Education 2023 Q1 Statistics and Probability 2023 Q1 Condensed Matter Physics 2023 Q1 Instrumentation 2023 Q1 Electrical and Electronic Engineering 2023 Q1 10.2 2023 info:eu-repo/semantics/article info:eu-repo/semantics/publishedVersion Torralba, M. (orcid)0000-0002-3069-2736 Muro, L. Albajez, J.A. Universidad de Zaragoza (orcid)0000-0003-4839-0610 Yagüe-Fabra, J.A. Universidad de Zaragoza (orcid)0000-0001-7152-4117 5002 515 Universidad de Zaragoza Dpto. Ingeniería Diseño Fabri. Área Ing. Procesos Fabricación 28, 112469 (2023), [15 pp.] Measurement MEASUREMENT 0263-2241 5749620 http://zaguan.unizar.es/record/121403/files/texto_completo.pdf Versión publicada 2500310 http://zaguan.unizar.es/record/121403/files/texto_completo.jpg?subformat=icon icon Versión publicada oai:zaguan.unizar.es:121403 articulos driver 2024-11-22-11:57:56 ARTICLE