doi:10.3390/nano13091516engJurczyk, JakubHöflich, KatjaMadajska, KatarzynaBerger, LuisaBrockhuis, LeoEdwards, Thomas Edward JamesKapusta, CzeslawSzymanska, Iwona B.Utke, IvoLigand size and carbon-chain length study of silver carboxylates in focused electron-beam-induced depositionART-2023-133574Gas-assisted focused electron-beam-induced deposition is a versatile tool for the direct writing of complex-shaped nanostructures with unprecedented shape fidelity and resolution. While the technique is well-established for various materials, the direct electron beam writing of silver is still in its infancy. Here, we examine and compare five different silver carboxylates, three perfluorinated: [Ag2(µ-O2CCF3)2], [Ag2(µ-O2CC2F5)2], and [Ag2(µ-O2CC3F7)2], and two containing branched substituents: [Ag2(µ-O2CCMe2Et)2] and [Ag2(µ-O2CtBu)2], as potential precursors for focused electron-beam-induced deposition. All of the compounds show high sensitivity to electron dissociation and efficient dissociation of Ag-O bonds. The as-deposited materials have silver contents from 42 at.% to above 70 at.% and are composed of silver nano-crystals with impurities of carbon and fluorine between them. Precursors with the shortest carbon-fluorine chain ligands yield the highest silver contents. In addition, the deposited silver content depends on the balance of electron-induced ligand co-deposition and ligand desorption. For all of the tested compounds, low electron flux was related to high silver content. Our findings demonstrate that silver carboxylates constitute a promising group of precursors for gas-assisted focused electron beam writing of high silver content materials.2023http://zaguan.unizar.es/record/12598010.3390/nano13091516http://zaguan.unizar.es/record/125980oai:zaguan.unizar.es:125980info:eu-repo/grantAgreement/EC/H2020/722149/EU/Low energy ELEctron driven chemistry for the advantage of emerging NAno-fabrication methods/ELENAThis project has received funding from the European Union’s Horizon 2020 research and innovation program under grant agreement No H2020 722149-ELENANanomaterials 13, 9 (2023), 1516 [14 pp.]byhttp://creativecommons.org/licenses/by/3.0/es/info:eu-repo/semantics/openAccess