000126348 001__ 126348
000126348 005__ 20230602105037.0
000126348 0247_ $$2doi$$a10.1088/2633-4356/acbefb
000126348 0248_ $$2sideral$$a133801
000126348 037__ $$aART-2023-133801
000126348 041__ $$aeng
000126348 100__ $$0(orcid)0000-0001-9566-0738$$aDe Teresa, José María$$uUniversidad de Zaragoza
000126348 245__ $$aNanoscale direct-write fabrication of superconducting devices for application in quantum technologies
000126348 260__ $$c2023
000126348 5060_ $$aAccess copy available to the general public$$fUnrestricted
000126348 5203_ $$aIn this Perspective article, we evaluate the current state of research on the use of focused electron and ion beams to directly fabricate nanoscale superconducting devices with application in quantum technologies. First, the article introduces the main superconducting devices and their fabrication by means of standard lithography techniques such as optical lithography and electron beam lithography. Then, focused ion beam patterning of superconductors through milling or irradiation is shown, as well as the growth of superconducting devices by means of focused electron and ion beam induced deposition. We suggest that the key benefits of these resist-free direct-growth techniques for quantum technologies include the ability to make electrical nanocontacts and circuit edit, fabrication of high-resolution superconducting resonators, creation of Josephson junctions and superconducting quantum interference device (SQUIDs) for on-tip sensors, patterning of high-Tc SQUIDs and other superconducting circuits, and the exploration of fluxtronics and topological superconductivity.
000126348 536__ $$9info:eu-repo/grantAgreement/EUR/COST/CA19140 FIT4NANO$$9info:eu-repo/grantAgreement/ES/CSIC/PIE-202060E187$$9info:eu-repo/grantAgreement/ES/CSIC/PTI-001$$9info:eu-repo/grantAgreement/ES/DGA-FSE/E13-20R$$9info:eu-repo/grantAgreement/EC/H2020/892427/EU/Focused Ion Beam fabrication of superconducting scanning Probes/FIBsuperProbes$$9This project has received funding from the European Union’s Horizon 2020 research and innovation program under grant agreement No H2020 892427-FIBsuperProbes$$9info:eu-repo/grantAgreement/ES/MCIU/PID2020-112914RB-I00$$9info:eu-repo/grantAgreement/ES/MINECO/RED2018-102627-T
000126348 540__ $$9info:eu-repo/semantics/openAccess$$aby$$uhttp://creativecommons.org/licenses/by/3.0/es/
000126348 655_4 $$ainfo:eu-repo/semantics/article$$vinfo:eu-repo/semantics/publishedVersion
000126348 7102_ $$12003$$2395$$aUniversidad de Zaragoza$$bDpto. Física Materia Condensa.$$cÁrea Física Materia Condensada
000126348 773__ $$g3 (2023), 1-8$$pMater. quantum technol.$$tMaterials for quantum technology$$x2633-4356
000126348 8564_ $$s452952$$uhttps://zaguan.unizar.es/record/126348/files/texto_completo.pdf$$yVersión publicada
000126348 8564_ $$s2794649$$uhttps://zaguan.unizar.es/record/126348/files/texto_completo.jpg?subformat=icon$$xicon$$yVersión publicada
000126348 909CO $$ooai:zaguan.unizar.es:126348$$particulos$$pdriver
000126348 951__ $$a2023-06-02-09:10:18
000126348 980__ $$aARTICLE