126348 20240731103336.0 doi 10.1088/2633-4356/acbefb sideral 133801 ART-2023-133801 eng De Teresa, José María Universidad de Zaragoza (orcid)0000-0001-9566-0738 Nanoscale direct-write fabrication of superconducting devices for application in quantum technologies 2023 Access copy available to the general public Unrestricted In this Perspective article, we evaluate the current state of research on the use of focused electron and ion beams to directly fabricate nanoscale superconducting devices with application in quantum technologies. First, the article introduces the main superconducting devices and their fabrication by means of standard lithography techniques such as optical lithography and electron beam lithography. Then, focused ion beam patterning of superconductors through milling or irradiation is shown, as well as the growth of superconducting devices by means of focused electron and ion beam induced deposition. We suggest that the key benefits of these resist-free direct-growth techniques for quantum technologies include the ability to make electrical nanocontacts and circuit edit, fabrication of high-resolution superconducting resonators, creation of Josephson junctions and superconducting quantum interference device (SQUIDs) for on-tip sensors, patterning of high-Tc SQUIDs and other superconducting circuits, and the exploration of fluxtronics and topological superconductivity. info:eu-repo/grantAgreement/EUR/COST/CA19140 FIT4NANO info:eu-repo/grantAgreement/ES/CSIC/PIE-202060E187 info:eu-repo/grantAgreement/ES/CSIC/PTI-001 info:eu-repo/grantAgreement/ES/DGA-FSE/E13-20R info:eu-repo/grantAgreement/EC/H2020/892427/EU/Focused Ion Beam fabrication of superconducting scanning Probes/FIBsuperProbes This project has received funding from the European Union’s Horizon 2020 research and innovation program under grant agreement No H2020 892427-FIBsuperProbes info:eu-repo/grantAgreement/ES/MCIU/PID2020-112914RB-I00 info:eu-repo/grantAgreement/ES/MINECO/RED2018-102627-T info:eu-repo/semantics/openAccess by http://creativecommons.org/licenses/by/3.0/es/ 4.5 2023 info:eu-repo/semantics/article info:eu-repo/semantics/publishedVersion 2003 395 Universidad de Zaragoza Dpto. Física Materia Condensa. Área Física Materia Condensada 3 (2023), 1-8 Mater. quantum technol. Materials for quantum technology 2633-4356 452952 http://zaguan.unizar.es/record/126348/files/texto_completo.pdf Versión publicada 2794649 http://zaguan.unizar.es/record/126348/files/texto_completo.jpg?subformat=icon icon Versión publicada oai:zaguan.unizar.es:126348 articulos driver 2024-07-31-09:48:27 ARTICLE