000129391 001__ 129391
000129391 005__ 20241125101200.0
000129391 0247_ $$2doi$$a10.1109/JSEN.2023.3321238
000129391 0248_ $$2sideral$$a135436
000129391 037__ $$aART-2023-135436
000129391 041__ $$aeng
000129391 100__ $$0(orcid)0000-0003-1562-4433$$aMartínez Lahoz, Javier
000129391 245__ $$aImpact of Thermal Variations and Soldering Process on Performance and Behavior of MEMS Capacitive Accelerometers
000129391 260__ $$c2023
000129391 5060_ $$aAccess copy available to the general public$$fUnrestricted
000129391 5203_ $$aThis work presents an analysis of performance and multiple parameters of microelectromechanical system (MEMS) capacitive accelerometers in applications with large thermal variations and the effects of the soldering process on them. The proposed test consists of a thermal characterization phase performed between two mechanical calibrations. The test is performed on multiple units before and after the soldering process. Mechanical, thermal, and performance parameters are analyzed and compared among all tests. The ranges and relative variations of these characteristics, both during the soldering process and the tests, have been identified and characterized individually. Mechanical bias shows greater variability than other parameters in both the soldering process and thermal tests. On the contrary, the thermal characteristic parameters show great stability in all cases. The thermal drifts, which are the main source of error in environments with large thermal variations, are successfully compensated for using a model with only two characteristic parameters. According to the observed behaviors, negative thermal variations (toward cooler temperatures) might be more suitable for thermal calibration due to other effects, such as creep, taking place primarily at hotter temperatures. The creep effect at constant temperature is analyzed according to the Kelvin–Voigt model with promising results, and a possible link between thermal drift and creep effects is presented. Performance results are calculated in multiple compensation scenarios. Using the proposed compensation techniques, the average maximum error is reduced from over 70 to 7 mg and the uncertainty is also reduced to a third of the initial value.
000129391 540__ $$9info:eu-repo/semantics/openAccess$$aby$$uhttp://creativecommons.org/licenses/by/3.0/es/
000129391 590__ $$a4.3$$b2023
000129391 592__ $$a1.084$$b2023
000129391 591__ $$aENGINEERING, ELECTRICAL & ELECTRONIC$$b84 / 353 = 0.238$$c2023$$dQ1$$eT1
000129391 593__ $$aInstrumentation$$c2023$$dQ1
000129391 591__ $$aINSTRUMENTS & INSTRUMENTATION$$b15 / 76 = 0.197$$c2023$$dQ1$$eT1
000129391 593__ $$aElectrical and Electronic Engineering$$c2023$$dQ1
000129391 591__ $$aPHYSICS, APPLIED$$b48 / 179 = 0.268$$c2023$$dQ2$$eT1
000129391 594__ $$a7.7$$b2023
000129391 655_4 $$ainfo:eu-repo/semantics/article$$vinfo:eu-repo/semantics/publishedVersion
000129391 700__ $$0(orcid)0000-0003-3618-4940$$aAsiain Ansorena, David
000129391 700__ $$0(orcid)0000-0002-7500-4650$$aBeltrán Blázquez, José Ramón$$uUniversidad de Zaragoza
000129391 7102_ $$15008$$2785$$aUniversidad de Zaragoza$$bDpto. Ingeniería Electrón.Com.$$cÁrea Tecnología Electrónica
000129391 773__ $$g23, 22 (2023), 27124-27136$$pIEEE sens. j.$$tIEEE SENSORS JOURNAL$$x1530-437X
000129391 8564_ $$s2157195$$uhttps://zaguan.unizar.es/record/129391/files/texto_completo.pdf$$yVersión publicada
000129391 8564_ $$s3571991$$uhttps://zaguan.unizar.es/record/129391/files/texto_completo.jpg?subformat=icon$$xicon$$yVersión publicada
000129391 909CO $$ooai:zaguan.unizar.es:129391$$particulos$$pdriver
000129391 951__ $$a2024-11-22-12:11:24
000129391 980__ $$aARTICLE