000129661 001__ 129661
000129661 005__ 20250410140952.0
000129661 0247_ $$2doi$$a10.3390/nano13202749
000129661 0248_ $$2sideral$$a135876
000129661 037__ $$aART-2023-135876
000129661 041__ $$aeng
000129661 100__ $$0(orcid)0009-0004-1203-9129$$aHerguedas, Natalia$$uUniversidad de Zaragoza
000129661 245__ $$aOptical properties in mid-infrared range of silicon oxide thin films with different stoichiometries
000129661 260__ $$c2023
000129661 5060_ $$aAccess copy available to the general public$$fUnrestricted
000129661 5203_ $$aSiOx thin films were prepared using magnetron sputtering with different O2 flow rates on a silicon substrate. The samples were characterized using Fourier transform infrared spectroscopy in transmission and reflection, covering a spectral range of 5 to 25 μm. By employing a multilayer model, the values of the complex refractive index that best fit the experimental transmission and reflection results were optimized using the Brendel–Bormann oscillator model. The results demonstrate the significance of selecting an appropriate range of O2 flow rates to modify the SiOx stoichiometry, as well as how the refractive index values can be altered between those of Si and SiO2 in the mid-infrared range.
000129661 536__ $$9info:eu-repo/grantAgreement/ES/DGA/T20-20R
000129661 540__ $$9info:eu-repo/semantics/openAccess$$aby$$uhttp://creativecommons.org/licenses/by/3.0/es/
000129661 590__ $$a4.4$$b2023
000129661 592__ $$a0.798$$b2023
000129661 591__ $$aMATERIALS SCIENCE, MULTIDISCIPLINARY$$b146 / 439 = 0.333$$c2023$$dQ2$$eT2
000129661 593__ $$aChemical Engineering (miscellaneous)$$c2023$$dQ1
000129661 591__ $$aNANOSCIENCE & NANOTECHNOLOGY$$b62 / 141 = 0.44$$c2023$$dQ2$$eT2
000129661 593__ $$aMaterials Science (miscellaneous)$$c2023$$dQ2
000129661 591__ $$aCHEMISTRY, MULTIDISCIPLINARY$$b70 / 231 = 0.303$$c2023$$dQ2$$eT1
000129661 591__ $$aPHYSICS, APPLIED$$b47 / 179 = 0.263$$c2023$$dQ2$$eT1
000129661 594__ $$a8.5$$b2023
000129661 655_4 $$ainfo:eu-repo/semantics/article$$vinfo:eu-repo/semantics/publishedVersion
000129661 700__ $$0(orcid)0000-0002-9413-0265$$aCarretero, Enrique$$uUniversidad de Zaragoza
000129661 7102_ $$12002$$2385$$aUniversidad de Zaragoza$$bDpto. Física Aplicada$$cÁrea Física Aplicada
000129661 773__ $$g13, 20 (2023), 2749 [12 pp.]$$pNanomaterials (Basel)$$tNanomaterials$$x2079-4991
000129661 8564_ $$s2704032$$uhttps://zaguan.unizar.es/record/129661/files/texto_completo.pdf$$yVersión publicada
000129661 8564_ $$s2656442$$uhttps://zaguan.unizar.es/record/129661/files/texto_completo.jpg?subformat=icon$$xicon$$yVersión publicada
000129661 909CO $$ooai:zaguan.unizar.es:129661$$particulos$$pdriver
000129661 951__ $$a2025-04-10-14:07:02
000129661 980__ $$aARTICLE