000131228 001__ 131228 000131228 005__ 20240206154530.0 000131228 0247_ $$2doi$$a10.1016/j.optcom.2007.11.028 000131228 0248_ $$2sideral$$a64036 000131228 037__ $$aART-2008-64036 000131228 041__ $$aeng 000131228 100__ $$aCadarso, V. J. 000131228 245__ $$aSilicon-Based Rectangular Hollow Integrated Waveguides 000131228 260__ $$c2008 000131228 5203_ $$aThis paper describes the simulation, fabrication and characterization of silicon-based rectangular hollow waveguides. Numerical evaluation of such structures has been done using both modal propagation and ray tracing, low total losses and multimodal behavior, even for small core sizes, are predicted. Since light propagation in rectangular hollow waveguides strongly depends on the Fresnel coefficients at the facets, the technological processes have been optimized to obtain wall angles close to 89° and wall and base average roughness of 57 nm and <5 nm, respectively. Hence, roughness is negligible to the working wavelength (678 nm). Measured waveguides show total losses close to 6.0 dB for 3.0 cm length. The non-lineal response due to mode filtering in hollow waveguides has also been experimentally observed. Finally, loss simulations and measurements are in agreement, especially for the widest waveguides. For thinner structures, the reduction of the depth due to the DRIE process, together with the blundering of the vertices, causes a dramatic attenuation increase. All these effects should be taken into consideration when defining hollow structures. 000131228 540__ $$9info:eu-repo/semantics/openAccess$$aAll rights reserved$$uhttp://www.europeana.eu/rights/rr-f/ 000131228 590__ $$a1.552$$b2008 000131228 591__ $$aOPTICS$$b24 / 65 = 0.369$$c2008$$dQ2$$eT2 000131228 655_4 $$ainfo:eu-repo/semantics/article$$vinfo:eu-repo/semantics/publishedVersion 000131228 700__ $$aLlobera,A. 000131228 700__ $$0(orcid)0000-0002-6144-7928$$aSalinas,I.$$uUniversidad de Zaragoza 000131228 700__ $$0(orcid)0000-0002-4746-3139$$aIzquierdo,D.$$uUniversidad de Zaragoza 000131228 700__ $$0(orcid)0000-0003-3505-0078$$aGarces,I.$$uUniversidad de Zaragoza 000131228 700__ $$aDominguez,C. 000131228 7102_ $$15008$$2800$$aUniversidad de Zaragoza$$bDpto. Ingeniería Electrón.Com.$$cÁrea Teoría Señal y Comunicac. 000131228 773__ $$g281, 6 (2008), 1568-1575$$pOpt. commun.$$tOptics Communications$$x0030-4018 000131228 8564_ $$s820424$$uhttps://zaguan.unizar.es/record/131228/files/texto_completo.pdf$$yVersión publicada 000131228 8564_ $$s2613881$$uhttps://zaguan.unizar.es/record/131228/files/texto_completo.jpg?subformat=icon$$xicon$$yVersión publicada 000131228 909CO $$ooai:zaguan.unizar.es:131228$$particulos$$pdriver 000131228 951__ $$a2024-02-06-14:51:48 000131228 980__ $$aARTICLE