doi:10.1016/J.APMT.2023.102033engFrechilla, AlejandroNapari, MariStrkalj, NivesBarriuso, EduardoNiang, KhamHellenbrand, MarkusStrichovanec, PavelSimanjuntak, Firman MangasaAntorrena, GuillermoFlewitt, AndrewMagén, Césarde la Fuente, Germán F.MacManus-Driscoll, Judith L.Angurel, Luis AlbertoPardo, José ÁngelSpatially selective crystallization of ferroelectric Hf0.5Zr0.5O2 films induced by sub-nanosecond laser annealingART-2024-136799In this work we study the sub-nanosecond laser-induced crystallization of 10 nm-thick atomic layer deposited amorphous Hf0.5Zr0.5O2 (HZO) films in an air atmosphere. We used an infrared laser with 1064 nm wavelength and 800 ps pulses to anneal TiN/HZO/TiN capacitors by scanning an 80 μm-diameter spot along their top surface in a controlled way. The laser annealing process was optimised in terms of fluence to achieve the complete crystallization of HZO into a non-monoclinic polymorph, as demonstrated by X-ray diffraction and transmission electron microscopy. Piezoresponse force microscopy and polarization-field loops confirm that the optimal as-annealed HZO films are piezoelectric and ferroelectric from the first cycle on. Spatial selectivity was accomplished by scanning the laser on selected areas of the samples. Micro-diffraction experiments show that the transition between the crystallized and the amorphous region is abrupt within a distance of several hundred µm.2024http://zaguan.unizar.es/record/13128710.1016/J.APMT.2023.102033http://zaguan.unizar.es/record/131287oai:zaguan.unizar.es:131287info:eu-repo/grantAgreement/ES/DGA-FEDER E28-23Rinfo:eu-repo/grantAgreement/ES/DGA/T54-23Rinfo:eu-repo/grantAgreement/EC/H2020/882929/EU/Efficient and Robust Oxide Switching/EROSThis project has received funding from the European Union’s Horizon 2020 research and innovation program under grant agreement No H2020 882929-EROSinfo:eu-repo/grantAgreement/ES/MICINN-AEI/PID2020-112914RB-100/AEI/10.13039/501100011033Applied Materials Today 36 (2024), 102033 [10 pp.]byhttps://creativecommons.org/licenses/by/4.0/deed.esinfo:eu-repo/semantics/openAccess