131287 20260217205444.0 doi 10.1016/J.APMT.2023.102033 sideral 136799 ART-2024-136799 eng Frechilla, Alejandro Universidad de Zaragoza Spatially selective crystallization of ferroelectric Hf0.5Zr0.5O2 films induced by sub-nanosecond laser annealing 2024 Access copy available to the general public Unrestricted In this work we study the sub-nanosecond laser-induced crystallization of 10 nm-thick atomic layer deposited amorphous Hf0.5Zr0.5O2 (HZO) films in an air atmosphere. We used an infrared laser with 1064 nm wavelength and 800 ps pulses to anneal TiN/HZO/TiN capacitors by scanning an 80 μm-diameter spot along their top surface in a controlled way. The laser annealing process was optimised in terms of fluence to achieve the complete crystallization of HZO into a non-monoclinic polymorph, as demonstrated by X-ray diffraction and transmission electron microscopy. Piezoresponse force microscopy and polarization-field loops confirm that the optimal as-annealed HZO films are piezoelectric and ferroelectric from the first cycle on. Spatial selectivity was accomplished by scanning the laser on selected areas of the samples. Micro-diffraction experiments show that the transition between the crystallized and the amorphous region is abrupt within a distance of several hundred µm. info:eu-repo/grantAgreement/ES/DGA-FEDER E28-23R info:eu-repo/grantAgreement/ES/DGA/T54-23R info:eu-repo/grantAgreement/EC/H2020/882929/EU/Efficient and Robust Oxide Switching/EROS This project has received funding from the European Union’s Horizon 2020 research and innovation program under grant agreement No H2020 882929-EROS info:eu-repo/grantAgreement/ES/MICINN-AEI/PID2020-112914RB-100/AEI/10.13039/501100011033 info:eu-repo/semantics/openAccess by https://creativecommons.org/licenses/by/4.0/deed.es 6.9 2024 MATERIALS SCIENCE, MULTIDISCIPLINARY 104 / 461 = 0.226 2024 Q1 T1 1.421 2024 Materials Science (miscellaneous) 2024 Q1 12.1 2024 info:eu-repo/semantics/article info:eu-repo/semantics/publishedVersion Napari, Mari Strkalj, Nives Barriuso, Eduardo Niang, Kham Hellenbrand, Markus Strichovanec, Pavel Simanjuntak, Firman Mangasa Antorrena, Guillermo (orcid)0000-0001-5661-7964 Flewitt, Andrew Magén, César (orcid)0000-0002-6761-6171 de la Fuente, Germán F. (orcid)0000-0002-0500-1745 MacManus-Driscoll, Judith L. Angurel, Luis Alberto Universidad de Zaragoza (orcid)0000-0001-5685-2366 Pardo, José Ángel Universidad de Zaragoza (orcid)0000-0002-0111-8284 5001 065 Universidad de Zaragoza Dpto. Ciencia Tecnol.Mater.Fl. Área Cienc.Mater. Ingen.Metal. 36 (2024), 102033 [10 pp.] Applied Materials Today 2352-9407 Data of "Spatially selective crystallization of ferroelectric Hf0.5Zr0.5O2 films induced by sub-nanosecond laser annealing" DOI: 10.5281/zenodo.10213386 6130050 http://zaguan.unizar.es/record/131287/files/texto_completo.pdf Versión publicada 2559495 http://zaguan.unizar.es/record/131287/files/texto_completo.jpg?subformat=icon icon Versión publicada oai:zaguan.unizar.es:131287 articulos driver 2026-02-17-20:17:30 ARTICLE