000131836 001__ 131836 000131836 005__ 20240219150722.0 000131836 0247_ $$2doi$$a10.1063/5.0162597 000131836 0248_ $$2sideral$$a137036 000131836 037__ $$aART-2023-137036 000131836 041__ $$aeng 000131836 100__ $$aHöflich, Katja 000131836 245__ $$aRoadmap for focused ion beam technologies 000131836 260__ $$c2023 000131836 5060_ $$aAccess copy available to the general public$$fUnrestricted 000131836 5203_ $$aThe focused ion beam (FIB) is a powerful tool for fabrication, modification, and characterization of materials down to the nanoscale. Starting with the gallium FIB, which was originally intended for photomask repair in the semiconductor industry, there are now many different types of FIB that are commercially available. These instruments use a range of ion species and are applied broadly in materials science, physics, chemistry, biology, medicine, and even archaeology. The goal of this roadmap is to provide an overview of FIB instrumentation, theory, techniques, and applications. By viewing FIB developments through the lens of various research communities, we aim to identify future pathways for ion source and instrumentation development, as well as emerging applications and opportunities for improved understanding of the complex interplay of ion–solid interactions. We intend to provide a guide for all scientists in the field that identifies common research interest and will support future fruitful interactions connecting tool development, experiment, and theory. While a comprehensive overview of the field is sought, it is not possible to cover all research related to FIB technologies in detail. We give examples of specific projects within the broader context, referencing original works and previous review articles throughout. 000131836 536__ $$9info:eu-repo/grantAgreement/EUR/COST/CA19140 FIT4NANO 000131836 540__ $$9info:eu-repo/semantics/openAccess$$aby$$uhttp://creativecommons.org/licenses/by/3.0/es/ 000131836 655_4 $$ainfo:eu-repo/semantics/review$$vinfo:eu-repo/semantics/publishedVersion 000131836 700__ $$aHobler, Gerhard 000131836 700__ $$aAllen, Frances I. 000131836 700__ $$aWirtz, Tom 000131836 700__ $$aRius, Gemma 000131836 700__ $$aMcElwee-White, Lisa 000131836 700__ $$aKrasheninnikov, Arkady V. 000131836 700__ $$aSchmidt, Matthias 000131836 700__ $$aUtke, Ivo 000131836 700__ $$aKlingner, Nico 000131836 700__ $$aOsenberg, Markus 000131836 700__ $$aCórdoba, Rosa 000131836 700__ $$aDjurabekova, Flyura 000131836 700__ $$aManke, Ingo 000131836 700__ $$aMoll, Philip 000131836 700__ $$aManoccio, Mariachiara 000131836 700__ $$0(orcid)0000-0001-9566-0738$$aDe Teresa, José María$$uUniversidad de Zaragoza 000131836 700__ $$aBischoff, Lothar 000131836 700__ $$aMichler, Johann 000131836 700__ $$aDe Castro, Olivier 000131836 700__ $$aDelobbe, Anne 000131836 700__ $$aDunne, Peter 000131836 700__ $$aDobrovolskiy, Oleksandr V. 000131836 700__ $$aFrese, Natalie 000131836 700__ $$aGölzhäuser, Armin 000131836 700__ $$aMazarov, Paul 000131836 700__ $$aKoelle, Dieter 000131836 700__ $$aMöller, Wolfhard 000131836 700__ $$aPérez-Murano, Francesc 000131836 700__ $$aPhilipp, Patrick 000131836 700__ $$aVollnhals, Florian 000131836 700__ $$aHlawacek, Gregor 000131836 7102_ $$12003$$2395$$aUniversidad de Zaragoza$$bDpto. Física Materia Condensa.$$cÁrea Física Materia Condensada 000131836 773__ $$g10, 4 (2023), 041311 [94 pp.]$$pAppl. phys. rev.$$tApplied physics reviews$$x1931-9401 000131836 8564_ $$s15957063$$uhttps://zaguan.unizar.es/record/131836/files/texto_completo.pdf$$yVersión publicada 000131836 8564_ $$s1186401$$uhttps://zaguan.unizar.es/record/131836/files/texto_completo.jpg?subformat=icon$$xicon$$yVersión publicada 000131836 909CO $$ooai:zaguan.unizar.es:131836$$particulos$$pdriver 000131836 951__ $$a2024-02-19-13:28:28 000131836 980__ $$aARTICLE