131836 20241125101153.0 doi 10.1063/5.0162597 sideral 137036 ART-2023-137036 eng Höflich, Katja Roadmap for focused ion beam technologies 2023 Access copy available to the general public Unrestricted The focused ion beam (FIB) is a powerful tool for fabrication, modification, and characterization of materials down to the nanoscale. Starting with the gallium FIB, which was originally intended for photomask repair in the semiconductor industry, there are now many different types of FIB that are commercially available. These instruments use a range of ion species and are applied broadly in materials science, physics, chemistry, biology, medicine, and even archaeology. The goal of this roadmap is to provide an overview of FIB instrumentation, theory, techniques, and applications. By viewing FIB developments through the lens of various research communities, we aim to identify future pathways for ion source and instrumentation development, as well as emerging applications and opportunities for improved understanding of the complex interplay of ion–solid interactions. We intend to provide a guide for all scientists in the field that identifies common research interest and will support future fruitful interactions connecting tool development, experiment, and theory. While a comprehensive overview of the field is sought, it is not possible to cover all research related to FIB technologies in detail. We give examples of specific projects within the broader context, referencing original works and previous review articles throughout. info:eu-repo/grantAgreement/EUR/COST/CA19140 FIT4NANO info:eu-repo/semantics/openAccess by http://creativecommons.org/licenses/by/3.0/es/ 11.9 2023 PHYSICS, APPLIED 15 / 179 = 0.084 2023 Q1 T1 3.61 2023 Physics and Astronomy (miscellaneous) 2023 Q1 22.5 2023 info:eu-repo/semantics/review info:eu-repo/semantics/publishedVersion Hobler, Gerhard Allen, Frances I. Wirtz, Tom Rius, Gemma McElwee-White, Lisa Krasheninnikov, Arkady V. Schmidt, Matthias Utke, Ivo Klingner, Nico Osenberg, Markus Córdoba, Rosa Djurabekova, Flyura Manke, Ingo Moll, Philip Manoccio, Mariachiara De Teresa, José María Universidad de Zaragoza (orcid)0000-0001-9566-0738 Bischoff, Lothar Michler, Johann De Castro, Olivier Delobbe, Anne Dunne, Peter Dobrovolskiy, Oleksandr V. Frese, Natalie Gölzhäuser, Armin Mazarov, Paul Koelle, Dieter Möller, Wolfhard Pérez-Murano, Francesc Philipp, Patrick Vollnhals, Florian Hlawacek, Gregor 2003 395 Universidad de Zaragoza Dpto. Física Materia Condensa. Área Física Materia Condensada 10, 4 (2023), 041311 [94 pp.] Appl. phys. rev. Applied physics reviews 1931-9401 15957063 http://zaguan.unizar.es/record/131836/files/texto_completo.pdf Versión publicada 1186401 http://zaguan.unizar.es/record/131836/files/texto_completo.jpg?subformat=icon icon Versión publicada oai:zaguan.unizar.es:131836 articulos driver 2024-11-22-12:07:55 ARTICLE