132083 20240301161205.0 doi 10.3390/app112110123 sideral 125772 ART-2021-125772 eng Orús, P. (orcid)0000-0002-6087-7467 Cryo-focused ion beam-induced deposition of tungsten–carbon nanostructures using a thermoelectric plate 2021 Focused Ion Beam-Induced Deposition (FIBID) is a single-step nanopatterning technique that applies a focused beam of ions to induce the decomposition of a gaseous precursor. The processing rate of FIBID increases by two orders of magnitude when the process is performed at cryogenic temperatures (Cryo-FIBID): the precursor forms a condensed layer on the surface of the cooled substrate, greatly enhancing the amount of material available for decomposition. Cryo-FIBID has been achieved so far by making use of liquid nitrogen-based cooling circuits, which require the passage of a flowing gas as a cooling agent. Here, the Cryo-FIBID of the W(CO)6 precursor is performed using a coolant-free thermoelectric plate utilizing the Peltier effect. Performed at-60 ºC, the procedure yields a W–C-based material with structural and electrical properties comparable to those of its counterpart grown in coolant-based Cryo-FIBID. The use of the thermoelectric plate significantly reduces the vibrations and sample drift induced by the flow of passing coolant gas and allows for the fabrication of similar nanostructures. In summary, the reported process represents a further step towards the practical implementation of the Cryo-FIBID technique, and it will facilitate its use by a broader research community. © 2020 by the authors. Licensee MDPI, Basel, Switzerland. Access copy available to the general public Unrestricted info:eu-repo/grantAgreement/ES/DGA/E13-20R info:eu-repo/grantAgreement/ES/MCIU/PID2020-112914RB-I00 info:eu-repo/grantAgreement/ES/MINECO/MAT2017-82970-C2-1-R info:eu-repo/grantAgreement/ES/MINECO/MAT2017-82970-C2-2-R info:eu-repo/grantAgreement/ES/MINECO/MAT2018-102627-T info:eu-repo/semantics/openAccess by http://creativecommons.org/licenses/by/3.0/es/ 2.838 2021 PHYSICS, APPLIED 76 / 161 = 0.472 2021 Q2 T2 ENGINEERING, MULTIDISCIPLINARY 39 / 92 = 0.424 2021 Q2 T2 CHEMISTRY, MULTIDISCIPLINARY 100 / 179 = 0.559 2021 Q3 T2 MATERIALS SCIENCE, MULTIDISCIPLINARY 218 / 344 = 0.634 2021 Q3 T2 0.507 2021 Computer Science Applications 2021 Q2 Engineering (miscellaneous) 2021 Q2 Process Chemistry and Technology 2021 Q2 Materials Science (miscellaneous) 2021 Q2 Fluid Flow and Transfer Processes 2021 Q2 3.7 2021 info:eu-repo/semantics/article info:eu-repo/semantics/publishedVersion Sigloch, F. Sangiao, S. Universidad de Zaragoza (orcid)0000-0002-4123-487X Teresa Nogueras, J.M. de Universidad de Zaragoza (orcid)0000-0001-9566-0738 2003 395 Universidad de Zaragoza Dpto. Física Materia Condensa. Área Física Materia Condensada 11, 21 (2021), 10123 [7 pp] Appl. sci. Applied Sciences (Switzerland) 2076-3417 3700198 http://zaguan.unizar.es/record/132083/files/texto_completo.pdf Versión publicada 2748890 http://zaguan.unizar.es/record/132083/files/texto_completo.jpg?subformat=icon icon Versión publicada oai:zaguan.unizar.es:132083 articulos driver 2024-03-01-14:39:20 ARTICLE