132795 20260217205456.0 doi 10.1021/acs.jpcc.3c08250 sideral 137675 ART-2024-137675 eng Jungwirth, Felix Gas-Phase Synthesis of Iron Silicide Nanostructures Using a Single-Source Precursor: Comparing Direct-Write Processing and Thermal Conversion 2024 Access copy available to the general public Unrestricted The investigation of precursor classes for the fabrication of nanostructures is of specific interest for maskless fabrication and direct nanoprinting. In this study, the differences in material composition depending on the employed process are illustrated for focused-ion-beam- and focused-electron-beam-induced deposition (FIBID/FEBID) and compared to the thermal decomposition in chemical vapor deposition (CVD). This article reports on specific differences in the deposit composition and microstructure when the (H3Si)2Fe(CO)4 precursor is converted into an inorganic material. Maximum metal/metalloid contents of up to 90 at. % are obtained in FIBID deposits and higher than 90 at. % in CVD films, while FEBID with the same precursor provides material containing less than 45 at. % total metal/metalloid content. Moreover, the Fe:Si ratio is retained well in FEBID and CVD processes, but FIBID using Ga+ ions liberates more than 50% of the initial Si provided by the precursor. This suggests that precursors for FIBID processes targeting binary materials should include multiple bonding such as bridging positions for nonmetals. In addition, an in situ method for investigations of supporting thermal effects of precursor fragmentation during the direct-writing processes is presented, and the applicability of the precursor for nanoscale 3D FEBID writing is demonstrated. info:eu-repo/grantAgreement/ES/DGA/E13-23R info:eu-repo/grantAgreement/ES/DGA/E31-23R info:eu-repo/grantAgreement/ES/MCIU/PID2020-112914RB-I00 info:eu-repo/grantAgreement/ES/MICINN/PID2019-105881RB-I00 info:eu-repo/grantAgreement/EUR/MICINN/TED2021-131318B-I00 info:eu-repo/semantics/openAccess by https://creativecommons.org/licenses/by/4.0/deed.es 3.2 2024 CHEMISTRY, PHYSICAL 95 / 185 = 0.514 2024 Q3 T2 NANOSCIENCE & NANOTECHNOLOGY 88 / 147 = 0.599 2024 Q3 T2 MATERIALS SCIENCE, MULTIDISCIPLINARY 237 / 461 = 0.514 2024 Q3 T2 0.914 2024 Physical and Theoretical Chemistry 2024 Q1 Electronic, Optical and Magnetic Materials 2024 Q1 Surfaces, Coatings and Films 2024 Q1 Energy (miscellaneous) 2024 Q2 Nanoscience and Nanotechnology 2024 Q2 6.2 2024 info:eu-repo/semantics/article info:eu-repo/semantics/publishedVersion Salvador-Porroche, Alba (orcid)0000-0003-2517-9468 Porrati, Fabrizio Jochmann, Nicolas P. Knez, Daniel Huth, Michael Gracia, Isabel Cané, Carles Cea, Pilar Universidad de Zaragoza (orcid)0000-0002-4729-9578 De Teresa, José María (orcid)0000-0001-9566-0738 Barth, Sven 2012 755 Universidad de Zaragoza Dpto. Química Física Área Química Física 128, 7 (2024), 2967-2977 J. phys. chem., C Journal of physical chemistry. C. 1932-7447 5711524 http://zaguan.unizar.es/record/132795/files/texto_completo.pdf Versión publicada 3172981 http://zaguan.unizar.es/record/132795/files/texto_completo.jpg?subformat=icon icon Versión publicada oai:zaguan.unizar.es:132795 articulos driver 2026-02-17-20:20:23 ARTICLE