000144126 001__ 144126 000144126 005__ 20240827160745.0 000144126 037__ $$aGDOC-2022-66116 000144126 041__ $$aspa 000144126 041__ $$aeng 000144126 100__ $$0(orcid)0000-0003-3165-0156$$1308425$$aManuel Arruebo, Gordo 000144126 24500 $$966116$$aFabricación de micro y nanodispositivos 000144126 24200 $$966116$$aFabrication of Micro and Nanodevices 000144126 260__ $$aZaragoza$$bUniversidad de Zaragoza$$c2022-2023 000144126 521__ $$9637$$aMáster Universitario en Materiales Nanoestructurados para Aplicaciones Nanotecnológicas$$bMaster's in Nanostructured Materials for Nanotechnology Applications 000144126 540__ $$aby-nc-sa$$bCreative Commons$$c3.0$$uhttp://creativecommons.org/licenses/by-nc-sa/3.0/ 000144126 700__ $$0(orcid)0000-0003-2800-6845$$1773061$$aMaría Bernechea, Navarro 000144126 700__ $$0(orcid)0000-0002-4729-9578$$1302689$$aPilar Cea, Mingueza 000144126 700__ $$0(orcid)0000-0001-6040-1920$$1803365$$aEmilio José Juárez, Pérez 000144126 700__ $$0(orcid)0000-0002-7902-6005$$1383518$$aSusana de Marcos, Ruiz 000144126 700__ $$0(orcid)0000-0003-0602-492X$$1118994$$aClara Isabel Marquina, Garcia 000144126 700__ $$0(orcid)0000-0001-9897-6527$$1326791$$aMaría Pilar Pina, Iritia 000144126 700__ $$0(orcid)0000-0002-6873-5244$$1437168$$aVictor Sebastián, Cabeza 000144126 700__ $$0(orcid)0000-0002-7742-9329$$1332801$$aJavier Sesé, Monclús 000144126 700__ $$0(orcid)0000-0003-4599-796X$$1387306$$aJuan Carlos Vidal, Ibáñez 000144126 830__ $$9539 000144126 8564_ $$s18141$$uhttps://zaguan.unizar.es/record/144126/files/guia-66116-en.pdf$$yGuide (english) 000144126 970__ $$aGDOC-2022-66116 000144126 980__ $$aGDOC$$bSciences$$bCiencias$$c100