000147257 001__ 147257 000147257 005__ 20241216115436.0 000147257 0247_ $$2doi$$a10.1039/d4nr02680b 000147257 0248_ $$2sideral$$a141053 000147257 037__ $$aART-2024-141053 000147257 041__ $$aeng 000147257 100__ $$0(orcid)0000-0002-3576-5156$$aHerrer, Lucía 000147257 245__ $$aFabrication of palladium-enriched metallic structures by direct focused He<sup>+</sup> and Ne<sup>+</sup> beam nanowriting from organometallic thin films: a comparison with Ga<sup>+</sup> and e<sup>-</sup> beams 000147257 260__ $$c2024 000147257 5060_ $$aAccess copy available to the general public$$fUnrestricted 000147257 5203_ $$aA direct nanowriting procedure using helium- and neon-focused ion beams and spin-coated organometallic thin films is introduced and applied to the fabrication of Pd-enriched metallic structures in a single lithography step. This process presents significant advantages over multi-step resist-based lithography and focused beam-induced deposition using gaseous precursors, such as its simplicity and speed, respectively. The optimized process leads to Pd-rich structures with low electrical resistivity values of 141 and 152 μΩ cm under Ne+ or He+ fluences of 1000 and 5000 μC cm−2, respectively. These resistivity values correlate well with compositional and microstructural studies, indicating a high Pd metallic content in a dense structure with a few-nm grain size. The obtained results are compared to similar structures fabricated by direct electron and gallium beam nanowriting, demonstrating the full potential of nanopatterned Pd-based organometallic thin films under the most common focused charged beams. The practical applications of combining spin-coated organometallic thin films with focused beam nanowriting in micro- and nano-lithography modern procedures are also discussed in this contribution. 000147257 536__ $$9info:eu-repo/grantAgreement/ES/AEI/PDC2023-145810-I00$$9info:eu-repo/grantAgreement/ES/AEI/PID2020-11223914RB-I00$$9info:eu-repo/grantAgreement/ES/AEI/PID2022-141433OB-I00$$9info:eu-repo/grantAgreement/ES/AEI/PID2023-146451OB-I00$$9info:eu-repo/grantAgreement/ES/AEI/RED2022-134096-T$$9info:eu-repo/grantAgreement/ES/AEI/TED2021-131318B-I00$$9info:eu-repo/grantAgreement/EUR/COST-Action/CA19140$$9info:eu-repo/grantAgreement/ES/DGA/E13-23R$$9info:eu-repo/grantAgreement/ES/DGA/E31-23R 000147257 540__ $$9info:eu-repo/semantics/openAccess$$aby-nc$$uhttp://creativecommons.org/licenses/by-nc/3.0/es/ 000147257 655_4 $$ainfo:eu-repo/semantics/article$$vinfo:eu-repo/semantics/publishedVersion 000147257 700__ $$0(orcid)0000-0003-2517-9468$$aSalvador-Porroche, Alba 000147257 700__ $$aHlawacek, Gregor 000147257 700__ $$0(orcid)0000-0002-4729-9578$$aCea, Pilar$$uUniversidad de Zaragoza 000147257 700__ $$0(orcid)0000-0001-9566-0738$$aDe Teresa, José María 000147257 7102_ $$12012$$2755$$aUniversidad de Zaragoza$$bDpto. Química Física$$cÁrea Química Física 000147257 773__ $$g16, 45 (2024), 21128-21137$$pNanoscale$$tNanoscale$$x2040-3364 000147257 8564_ $$s1755772$$uhttps://zaguan.unizar.es/record/147257/files/texto_completo.pdf$$yVersión publicada 000147257 8564_ $$s2727346$$uhttps://zaguan.unizar.es/record/147257/files/texto_completo.jpg?subformat=icon$$xicon$$yVersión publicada 000147257 909CO $$ooai:zaguan.unizar.es:147257$$particulos$$pdriver 000147257 951__ $$a2024-12-16-11:28:19 000147257 980__ $$aARTICLE