doi:10.1039/d4nr02680bengHerrer, LucíaSalvador-Porroche, AlbaHlawacek, GregorCea, PilarDe Teresa, José MaríaFabrication of palladium-enriched metallic structures by direct focused He⁺ and Ne⁺ beam nanowriting from organometallic thin films: a comparison with Ga⁺ and e^- beamsART-2024-141053A direct nanowriting procedure using helium- and neon-focused ion beams and spin-coated organometallic thin films is introduced and applied to the fabrication of Pd-enriched metallic structures in a single lithography step. This process presents significant advantages over multi-step resist-based lithography and focused beam-induced deposition using gaseous precursors, such as its simplicity and speed, respectively. The optimized process leads to Pd-rich structures with low electrical resistivity values of 141 and 152 μΩ cm under Ne+ or He+ fluences of 1000 and 5000 μC cm−2, respectively. These resistivity values correlate well with compositional and microstructural studies, indicating a high Pd metallic content in a dense structure with a few-nm grain size. The obtained results are compared to similar structures fabricated by direct electron and gallium beam nanowriting, demonstrating the full potential of nanopatterned Pd-based organometallic thin films under the most common focused charged beams. The practical applications of combining spin-coated organometallic thin films with focused beam nanowriting in micro- and nano-lithography modern procedures are also discussed in this contribution.2024http://zaguan.unizar.es/record/14725710.1039/d4nr02680bhttp://zaguan.unizar.es/record/147257oai:zaguan.unizar.es:147257info:eu-repo/grantAgreement/ES/AEI/PDC2023-145810-I00info:eu-repo/grantAgreement/ES/AEI/PID2020-11223914RB-I00info:eu-repo/grantAgreement/ES/AEI/PID2022-141433OB-I00info:eu-repo/grantAgreement/ES/AEI/PID2023-146451OB-I00info:eu-repo/grantAgreement/ES/AEI/RED2022-134096-Tinfo:eu-repo/grantAgreement/ES/AEI/TED2021-131318B-I00info:eu-repo/grantAgreement/EUR/COST-Action/CA19140info:eu-repo/grantAgreement/ES/DGA/E13-23Rinfo:eu-repo/grantAgreement/ES/DGA/E31-23RNanoscale 16, 45 (2024), 21128-21137by-nchttps://creativecommons.org/licenses/by-nc/4.0/deed.esinfo:eu-repo/semantics/openAccess