147257 20260217205607.0 doi 10.1039/d4nr02680b sideral 141053 ART-2024-141053 eng Herrer, Lucía (orcid)0000-0002-3576-5156 Fabrication of palladium-enriched metallic structures by direct focused He⁺ and Ne⁺ beam nanowriting from organometallic thin films: a comparison with Ga⁺ and e^- beams 2024 Access copy available to the general public Unrestricted A direct nanowriting procedure using helium- and neon-focused ion beams and spin-coated organometallic thin films is introduced and applied to the fabrication of Pd-enriched metallic structures in a single lithography step. This process presents significant advantages over multi-step resist-based lithography and focused beam-induced deposition using gaseous precursors, such as its simplicity and speed, respectively. The optimized process leads to Pd-rich structures with low electrical resistivity values of 141 and 152 μΩ cm under Ne+ or He+ fluences of 1000 and 5000 μC cm−2, respectively. These resistivity values correlate well with compositional and microstructural studies, indicating a high Pd metallic content in a dense structure with a few-nm grain size. The obtained results are compared to similar structures fabricated by direct electron and gallium beam nanowriting, demonstrating the full potential of nanopatterned Pd-based organometallic thin films under the most common focused charged beams. The practical applications of combining spin-coated organometallic thin films with focused beam nanowriting in micro- and nano-lithography modern procedures are also discussed in this contribution. info:eu-repo/grantAgreement/ES/AEI/PDC2023-145810-I00 info:eu-repo/grantAgreement/ES/AEI/PID2020-11223914RB-I00 info:eu-repo/grantAgreement/ES/AEI/PID2022-141433OB-I00 info:eu-repo/grantAgreement/ES/AEI/PID2023-146451OB-I00 info:eu-repo/grantAgreement/ES/AEI/RED2022-134096-T info:eu-repo/grantAgreement/ES/AEI/TED2021-131318B-I00 info:eu-repo/grantAgreement/EUR/COST-Action/CA19140 info:eu-repo/grantAgreement/ES/DGA/E13-23R info:eu-repo/grantAgreement/ES/DGA/E31-23R info:eu-repo/semantics/openAccess by-nc https://creativecommons.org/licenses/by-nc/4.0/deed.es 5.1 2024 PHYSICS, APPLIED 46 / 187 = 0.246 2024 Q1 T1 NANOSCIENCE & NANOTECHNOLOGY 53 / 147 = 0.361 2024 Q2 T2 CHEMISTRY, MULTIDISCIPLINARY 67 / 239 = 0.28 2024 Q2 T1 MATERIALS SCIENCE, MULTIDISCIPLINARY 142 / 461 = 0.308 2024 Q2 T1 1.245 2024 Nanoscience and Nanotechnology 2024 Q1 Materials Science (miscellaneous) 2024 Q1 9.9 2024 info:eu-repo/semantics/article info:eu-repo/semantics/publishedVersion Salvador-Porroche, Alba (orcid)0000-0003-2517-9468 Hlawacek, Gregor Cea, Pilar Universidad de Zaragoza (orcid)0000-0002-4729-9578 De Teresa, José María (orcid)0000-0001-9566-0738 2012 755 Universidad de Zaragoza Dpto. Química Física Área Química Física 16, 45 (2024), 21128-21137 Nanoscale Nanoscale 2040-3364 1755772 http://zaguan.unizar.es/record/147257/files/texto_completo.pdf Versión publicada 2727346 http://zaguan.unizar.es/record/147257/files/texto_completo.jpg?subformat=icon icon Versión publicada oai:zaguan.unizar.es:147257 articulos driver 2026-02-17-20:47:14 ARTICLE