000150090 001__ 150090
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000150090 0247_ $$2doi$$a10.1016/j.measurement.2016.03.075
000150090 0248_ $$2sideral$$a94760
000150090 037__ $$aART-2016-94760
000150090 041__ $$aeng
000150090 100__ $$0(orcid)0000-0002-3069-2736$$aTorralba, M.
000150090 245__ $$aLarge range nanopositioning stage design: A three-layer and two-stage platform
000150090 260__ $$c2016
000150090 5060_ $$aAccess copy available to the general public$$fUnrestricted
000150090 5203_ $$aIn this article, a novel two-dimensional nanopositioning platform (NanoPla) design is described. Its requirements are not only sub-micrometer accuracy for nanotechnology applications, but also long working range (XY-motion 50 mm × 50 mm). These features increase the common range operation of devices for nanotechnology issues (e.g. an atomic force microscope), and the number of potential metrological applications: positioning for manufacturing, manipulation or sample characterization. This novel design is characterized by a three-layer architecture and a two-stage motion strategy, which minimizes the measurement error. The manufactured prototype is here justified considering precision engineering principles and a wide state-of-art study of the literature, regarding long range nanopositioning stages. The simulations, the experimental results and the error budget also allowed, first, the optimization and, secondly, the validation of the design at nanometer scale.
000150090 536__ $$9info:eu-repo/grantAgreement/ES/MINECO/DPI2010-21629-C02-01$$9info:eu-repo/grantAgreement/ES/UZ/PIFUZ-2014-TEC-05
000150090 540__ $$9info:eu-repo/semantics/openAccess$$aby-nc-nd$$uhttp://creativecommons.org/licenses/by-nc-nd/3.0/es/
000150090 590__ $$a2.359$$b2016
000150090 591__ $$aENGINEERING, MULTIDISCIPLINARY$$b19 / 85 = 0.224$$c2016$$dQ1$$eT1
000150090 591__ $$aINSTRUMENTS & INSTRUMENTATION$$b15 / 58 = 0.259$$c2016$$dQ2$$eT1
000150090 592__ $$a0.726$$b2016
000150090 593__ $$aElectrical and Electronic Engineering$$c2016$$dQ1
000150090 593__ $$aInstrumentation$$c2016$$dQ1
000150090 593__ $$aEducation$$c2016$$dQ1
000150090 593__ $$aStatistics and Probability$$c2016$$dQ2
000150090 593__ $$aCondensed Matter Physics$$c2016$$dQ2
000150090 593__ $$aApplied Mathematics$$c2016$$dQ2
000150090 655_4 $$ainfo:eu-repo/semantics/article$$vinfo:eu-repo/semantics/acceptedVersion
000150090 700__ $$aValenzuela , M.
000150090 700__ $$0(orcid)0000-0001-7152-4117$$aYagüe-Fabra, J. A.$$uUniversidad de Zaragoza
000150090 700__ $$0(orcid)0000-0003-4839-0610$$aAlbajez, J. A.$$uUniversidad de Zaragoza
000150090 700__ $$0(orcid)0000-0002-8609-1358$$aAguilar, J. J.$$uUniversidad de Zaragoza
000150090 7102_ $$15002$$2515$$aUniversidad de Zaragoza$$bDpto. Ingeniería Diseño Fabri.$$cÁrea Ing. Procesos Fabricación
000150090 773__ $$g89 (2016), 55-71$$pMeasurement$$tMEASUREMENT$$x0263-2241
000150090 8564_ $$s2080014$$uhttps://zaguan.unizar.es/record/150090/files/texto_completo.pdf$$yPostprint
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000150090 951__ $$a2025-01-31-12:02:04
000150090 980__ $$aARTICLE