150090 20251017144546.0 doi 10.1016/j.measurement.2016.03.075 sideral 94760 ART-2016-94760 eng Torralba, M. (orcid)0000-0002-3069-2736 Large range nanopositioning stage design: A three-layer and two-stage platform 2016 Access copy available to the general public Unrestricted In this article, a novel two-dimensional nanopositioning platform (NanoPla) design is described. Its requirements are not only sub-micrometer accuracy for nanotechnology applications, but also long working range (XY-motion 50 mm × 50 mm). These features increase the common range operation of devices for nanotechnology issues (e.g. an atomic force microscope), and the number of potential metrological applications: positioning for manufacturing, manipulation or sample characterization. This novel design is characterized by a three-layer architecture and a two-stage motion strategy, which minimizes the measurement error. The manufactured prototype is here justified considering precision engineering principles and a wide state-of-art study of the literature, regarding long range nanopositioning stages. The simulations, the experimental results and the error budget also allowed, first, the optimization and, secondly, the validation of the design at nanometer scale. info:eu-repo/grantAgreement/ES/MINECO/DPI2010-21629-C02-01 info:eu-repo/grantAgreement/ES/UZ/PIFUZ-2014-TEC-05 info:eu-repo/semantics/openAccess by-nc-nd https://creativecommons.org/licenses/by-nc-nd/4.0/deed.es 2.359 2016 ENGINEERING, MULTIDISCIPLINARY 19 / 85 = 0.224 2016 Q1 T1 INSTRUMENTS & INSTRUMENTATION 15 / 58 = 0.259 2016 Q2 T1 0.726 2016 Education 2016 Q1 Instrumentation 2016 Q1 Electrical and Electronic Engineering 2016 Q1 Statistics and Probability 2016 Q2 Condensed Matter Physics 2016 Q2 Applied Mathematics 2016 Q2 info:eu-repo/semantics/article info:eu-repo/semantics/acceptedVersion Valenzuela , M. Yagüe-Fabra, J. A. Universidad de Zaragoza (orcid)0000-0001-7152-4117 Albajez, J. A. Universidad de Zaragoza (orcid)0000-0003-4839-0610 Aguilar, J. J. Universidad de Zaragoza (orcid)0000-0002-8609-1358 5002 515 Universidad de Zaragoza Dpto. Ingeniería Diseño Fabri. Área Ing. Procesos Fabricación 89 (2016), 55-71 Measurement MEASUREMENT 0263-2241 2080014 http://zaguan.unizar.es/record/150090/files/texto_completo.pdf Postprint 2677107 http://zaguan.unizar.es/record/150090/files/texto_completo.jpg?subformat=icon icon Postprint oai:zaguan.unizar.es:150090 articulos driver 2025-10-17-14:09:51 ARTICLE