000162901 001__ 162901
000162901 005__ 20251017144603.0
000162901 0247_ $$2doi$$a10.1039/d5lf00076a
000162901 0248_ $$2sideral$$a145453
000162901 037__ $$aART-2025-145453
000162901 041__ $$aeng
000162901 100__ $$aFrechilla, A.$$uUniversidad de Zaragoza
000162901 245__ $$aLaser annealing of transparent ZnO thin films: a route to improve electrical conductivity and oxygen sensing capabilities
000162901 260__ $$c2025
000162901 5060_ $$aAccess copy available to the general public$$fUnrestricted
000162901 5203_ $$aThe chemical deposition of high-performance zinc oxide (ZnO) thin films is challenging, thus significant efforts have been devoted during the past decades to develop cost-effective, scalable fabrication methods in gas phase. This work demonstrates how ultra-short-pulse laser beam scanning (LBS) can be used to modulate electrical conductivity in ZnO thin films deposited on soda–lime glass by spatial atomic layer deposition (SALD), a high-throughput, low-temperature deposition technique suitable for large-area applications. By systematically optimizing laser parameters, including pulse energy and hatching distance, significant improvements in the electrical performance of 90 nm-thick ZnO films were achieved. The optimization of the laser annealing parameters – 0.21 μJ per pulse energy and a 1 μm hatching distance—yielded ZnO films with an electrical resistivity of (9 ± 2) × 10−2 Ω cm, 3 orders of magnitude lower than as-deposited films. This result suggests that laser post-deposition processing can play an important role in tailoring the properties of ZnO thin films. Excessive laser intensity can compromise structural integrity of the films, however, degrading their electrical transport properties. Notably, the electrical resistance of laser-annealed ZnO films exhibited high sensitivity to oxygen concentration in the surrounding atmosphere, suggesting exciting prospects for application in devices based on transparent oxygen sensors. This study thus positions ultra-short pulsed laser annealing as a versatile post-deposition method for fine-tuning the properties of ZnO thin films, enabling their use in advanced optoelectronic and gas-sensing technologies, particularly on temperature-sensitive substrates.
000162901 536__ $$9info:eu-repo/grantAgreement/ES/DGA/T54-23R$$9info:eu-repo/grantAgreement/EC/H2020/801464/EU/ Ultra-versatile Structural PRINTing of amorphous and tuned crystalline matter on multiple substrates /SPRINT$$9This project has received funding from the European Union’s Horizon 2020 research and innovation program under grant agreement No H2020 801464-SPRINT$$9info:eu-repo/grantAgreement/ES/MCIU/PID2023-146041OB-C21$$9info:eu-repo/grantAgreement/ES/MICINN/AEI/PID2020-113034RB-I00
000162901 540__ $$9info:eu-repo/semantics/openAccess$$aby-nc$$uhttps://creativecommons.org/licenses/by-nc/4.0/deed.es
000162901 655_4 $$ainfo:eu-repo/semantics/article$$vinfo:eu-repo/semantics/publishedVersion
000162901 700__ $$0(orcid)0009-0007-9057-3943$$aFrechilla, J.$$uUniversidad de Zaragoza
000162901 700__ $$0(orcid)0000-0001-5685-2366$$aAngurel, L. A.$$uUniversidad de Zaragoza
000162901 700__ $$aToldrá-Reig, F.
000162901 700__ $$0(orcid)0000-0001-5512-0075$$aBalas, F.$$uUniversidad de Zaragoza
000162901 700__ $$aMartínez, E.
000162901 700__ $$0(orcid)0000-0002-0500-1745$$ade La Fuente, G. F.
000162901 700__ $$aMuñoz-Rojas, D.
000162901 7102_ $$12005$$2595$$aUniversidad de Zaragoza$$bDpto. Matemática Aplicada$$cÁrea Matemática Aplicada
000162901 7102_ $$15005$$2555$$aUniversidad de Zaragoza$$bDpto. Ing.Quím.Tecnol.Med.Amb.$$cÁrea Ingeniería Química
000162901 7102_ $$15001$$2065$$aUniversidad de Zaragoza$$bDpto. Ciencia Tecnol.Mater.Fl.$$cÁrea Cienc.Mater. Ingen.Metal.
000162901 773__ $$g(2025), [14 pp.]$$pRSC appl. interfaces$$tRSC applied interfaces$$x2755-3701
000162901 8564_ $$s2159706$$uhttps://zaguan.unizar.es/record/162901/files/texto_completo.pdf$$yVersión publicada
000162901 8564_ $$s2764605$$uhttps://zaguan.unizar.es/record/162901/files/texto_completo.jpg?subformat=icon$$xicon$$yVersión publicada
000162901 909CO $$ooai:zaguan.unizar.es:162901$$particulos$$pdriver
000162901 951__ $$a2025-10-17-14:14:32
000162901 980__ $$aARTICLE