000165060 001__ 165060
000165060 005__ 20251204150239.0
000165060 0247_ $$2doi$$a10.1021/acsami.5c11133
000165060 0248_ $$2sideral$$a146582
000165060 037__ $$aART-2025-146582
000165060 041__ $$aeng
000165060 100__ $$aSánchez-Fuentes, David
000165060 245__ $$aSustainable Wafer-Scale Integration of Epitaxial ZnO on Silicon for Piezoelectric Devices
000165060 260__ $$c2025
000165060 5203_ $$aTo sustainably support the ongoing energetic transition, we need metal oxides capable of converting energy and produce sensing devices. However, these materials suffer from a high economic cost of manufacturing, and their production in a sustainable way is, to date, a milestone. Additionally, the technical challenges, such as scalability and integration on silicon for industrial processing using microelectronic technologies, impose strict conditions for the entire materials process. In this work, we engineer α-quartz virtual substrates up to 4 inches, facilitating the large-scale and sustainable integration of epitaxial ZnO microwire films on silicon. These materials are manufactured on silicon by using solution chemistry, providing single-chip solutions that can meet strict economic constraints for developing sustainable devices at a lower cost. Through this integrative technology, we demonstrate the microfabrication of epitaxial (110)ZnO/(100)α-quartz/(100)silicon piezoelectric membrane resonators at the wafer scale with potential applications in energy conversion and sensing. We combined four-dimensional (4D) STEM diffraction and piezoelectric force microscopy (PFM) to establish a correlation between out-of-plane crystalline strain and piezoelectric response in epitaxial (110)ZnO at the microscale. Finally, we proved the fabrication of 800 nm thick (110)ZnO suspended membranes that can be transferred to flexible substrates, making them suitable for flexible devices.
000165060 536__ $$9info:eu-repo/grantAgreement/ES/AEI/PID2020-118479RB-100$$9info:eu-repo/grantAgreement/EC/H2020/803004/EU/New sensor devices based on soft chemistry assisted nanostructured functional oxides on Si integrated systems/SENSiSOFT$$9This project has received funding from the European Union’s Horizon 2020 research and innovation program under grant agreement No H2020 803004-SENSiSOFT$$9info:eu-repo/grantAgreement/ES/MICINN/PID2023-147211OB-C22
000165060 540__ $$9info:eu-repo/semantics/closedAccess$$aAll rights reserved$$uhttp://www.europeana.eu/rights/rr-f/
000165060 655_4 $$ainfo:eu-repo/semantics/article$$vinfo:eu-repo/semantics/publishedVersion
000165060 700__ $$aRahal, Abbes
000165060 700__ $$aDesgarceaux, Rudy
000165060 700__ $$aGarcía, Lorenzo
000165060 700__ $$aBouisri, Samir
000165060 700__ $$aDing, Sijie
000165060 700__ $$aCamara, Nicolás
000165060 700__ $$aPascal, Fabien
000165060 700__ $$aGarcía-Bermejo, Ricardo
000165060 700__ $$aGuillaume, Nicolas
000165060 700__ $$aArdila, Gustavo
000165060 700__ $$aGazquez, Jaume
000165060 700__ $$0(orcid)0000-0002-6761-6171$$aMagén, César
000165060 700__ $$aPlana-Ruiz, Sergi
000165060 700__ $$aGuasch, Cathy
000165060 700__ $$aCarretero-Genevrier, Adrian
000165060 773__ $$g17, 46 (2025), 63518-63531$$pACS appl. mater. interfaces$$tACS applied materials & interfaces$$x1944-8244
000165060 8564_ $$s3267593$$uhttps://zaguan.unizar.es/record/165060/files/texto_completo.pdf$$yVersión publicada$$zinfo:eu-repo/date/embargoEnd/2026-11-05
000165060 8564_ $$s3310990$$uhttps://zaguan.unizar.es/record/165060/files/texto_completo.jpg?subformat=icon$$xicon$$yVersión publicada$$zinfo:eu-repo/date/embargoEnd/2026-11-05
000165060 909CO $$ooai:zaguan.unizar.es:165060$$particulos$$pdriver
000165060 951__ $$a2025-12-04-14:40:15
000165060 980__ $$aARTICLE