000165172 001__ 165172 000165172 005__ 20251219174251.0 000165172 0247_ $$2doi$$a10.1063/5.0297535 000165172 0248_ $$2sideral$$a146995 000165172 037__ $$aART-2025-146995 000165172 041__ $$aeng 000165172 100__ $$aŽelezný, V. 000165172 245__ $$aInfrared phonons in monoclinic Hf0.5Zr0.5O2 thin films 000165172 260__ $$c2025 000165172 5060_ $$aAccess copy available to the general public$$fUnrestricted 000165172 5203_ $$aInfrared (IR) reflectance spectra of monoclinic Hf0.5Zr0.5O2 (HZO) films with thickness in the range of 10–90 nm deposited on different cuts of Al2O3 and yttria-stabilized zirconia (YSZ) substrates were measured in the frequency region 30–4000 cm−1. Several phonons belonging to HZO were observed even for the 10 nm films. X-ray diffraction measurements were used to determine the crystal structure of the films and their orientation with respect to the substrates. The phonon spectra of HZO films grown on the anisotropic (11¯02) R-cut Al2O3 substrates exhibit strong anisotropy. Comparing them with the spectra of the films on isotropic YSZ substrates, it allows us to assign the symmetry and polarization of the phonons in HZO films. Fitting the IR spectra by the classical Lorentz model, we obtain the phonon parameters, their response functions, and their contribution to static permittivity. We also measured the IR reflectance of HfO2, ZrO2 and HZO ceramics and compared their phonon parameters with those of the corresponding thin films. 000165172 536__ $$9info:eu-repo/grantAgreement/ES/DGA-FEDER E28-23R$$9info:eu-repo/grantAgreement/ES/MCIU/PRE2018-083233$$9info:eu-repo/grantAgreement/ES/MICINN-AEI/PID2020-112914RB-I00$$9info:eu-repo/grantAgreement/ES/MICINN/PID2023-147211OB-C22 000165172 540__ $$9info:eu-repo/semantics/openAccess$$aby$$uhttps://creativecommons.org/licenses/by/4.0/deed.es 000165172 655_4 $$ainfo:eu-repo/semantics/article$$vinfo:eu-repo/semantics/publishedVersion 000165172 700__ $$ade Prado, E. 000165172 700__ $$aBarriuso, E. 000165172 700__ $$0(orcid)0000-0002-4698-3378$$aAlgarabel, P. A. 000165172 700__ $$0(orcid)0000-0002-0111-8284$$aPardo, J. A.$$uUniversidad de Zaragoza 000165172 700__ $$aKamba, S. 000165172 7102_ $$15001$$2065$$aUniversidad de Zaragoza$$bDpto. Ciencia Tecnol.Mater.Fl.$$cÁrea Cienc.Mater. Ingen.Metal. 000165172 773__ $$g138, 21 (2025)$$pJ. appl. physi.$$tJournal of Applied Physics$$x0021-8979 000165172 8564_ $$s2338465$$uhttps://zaguan.unizar.es/record/165172/files/texto_completo.pdf$$yVersión publicada 000165172 8564_ $$s979226$$uhttps://zaguan.unizar.es/record/165172/files/texto_completo.jpg?subformat=icon$$xicon$$yVersión publicada 000165172 909CO $$ooai:zaguan.unizar.es:165172$$particulos$$pdriver 000165172 951__ $$a2025-12-19-14:42:20 000165172 980__ $$aARTICLE