000170065 001__ 170065
000170065 005__ 20260316092630.0
000170065 0247_ $$2doi$$a10.1016/j.apsusc.2026.166415
000170065 0248_ $$2sideral$$a148522
000170065 037__ $$aART-2026-148522
000170065 041__ $$aeng
000170065 100__ $$aFrechilla, A.$$uUniversidad de Zaragoza
000170065 245__ $$aInfluence of near-edge Laser-Induced Periodic Surface Structures (LIPSS) on the electrical properties of fs-laser-machined ITO microcircuits
000170065 260__ $$c2026
000170065 5060_ $$aAccess copy available to the general public$$fUnrestricted
000170065 5203_ $$aScalable, cost-effective methods for processing transparent electrodes at the microscale are pivotal to advancing in electrochemistry, optoelectronics, microfluidics, and energy harvesting. In these fields, the precise fabrication of micrometric circuits and patterns plays a critical role in determining device performance, material compatibility, and integration with added-value substrates. In this context, Laser Subtractive Manufacturing stands out as a suitable microfabrication technique for its adaptability to diverse materials and complex configurations, as well as its straightforward scalability, affordability, and eco-friendly nature. However, a challenge in micromachining metals and metal oxides is the inherent formation of Laser-Induced Periodic Surface Structures (LIPSS), which
can significantly impair electrical conductivity, particularly when circuit dimensions fall within the micrometer range. Herein, we investigate the micromachining of electrical microcircuits using ultrashort pulse laser systems applied to transparent indium tin oxide (ITO) thin films. We analyze the formation of LIPSS at the edges of the micromachined regions associated with the Gaussian distribution of the energy within the laser spot, and the impact of these structures on the electrical properties of the circuits. Thus, we systematically evaluate the influence of LIPSS orientation and periodicity by fabricating various circuit patterns using femtosecond lasers at green (515 nm) and ultraviolet (UV) (343 nm) wavelengths. A correlation between electrical resistivity measurements and microstructure analysis, as determined by field emission scanning electron and transmission electron microscopy, reveals distinct effects of the formed nanostructures depending on the laser source and its polarization. For the green wavelength, the edge side regions where LIPSS are oriented perpendicular to the ITO track exhibit a resistance higher by a factor just above two compared to those where LIPSS are parallel. Additionally, UV laser processing results in a pronounced reduction of ITO thickness at the boundary between the LIPSS region and the substrate. The mechanisms for the formation of LIPSS with both wavelengths are also discussed. Furthermore, we have determined that in narrow conductive tracks with a width ranging from 6 to 8 µm, the impact of LIPSS is particularly significant because the LIPSS structured region occupies a dominant fraction of the total width.
000170065 536__ $$9info:eu-repo/grantAgreement/EUR/AEI/TED2021-130916B-I0$$9info:eu-repo/grantAgreement/ES/DGA/T54-23R$$9info:eu-repo/grantAgreement/ES/MCIU/PID2023-146041OB-C21$$9info:eu-repo/grantAgreement/ES/MICINN/AEI/PID2020-113034RB-I00
000170065 540__ $$9info:eu-repo/semantics/openAccess$$aby-nc-nd$$uhttps://creativecommons.org/licenses/by-nc-nd/4.0/deed.es
000170065 655_4 $$ainfo:eu-repo/semantics/article$$vinfo:eu-repo/semantics/publishedVersion
000170065 700__ $$aMartínez, E.
000170065 700__ $$aMoral, J. del
000170065 700__ $$aLópez-Santos, C.
000170065 700__ $$0(orcid)0009-0007-9057-3943$$aFrechilla, J.$$uUniversidad de Zaragoza
000170065 700__ $$aNuñez-Gálvez, F.
000170065 700__ $$aLópez-Flores, V.
000170065 700__ $$0(orcid)0000-0002-0500-1745$$ade la Fuente, G.F.
000170065 700__ $$aHülagü, D.
000170065 700__ $$aBonse, J.
000170065 700__ $$aGonzález-Elipe, A.R.
000170065 700__ $$aBorrás, A.
000170065 700__ $$0(orcid)0000-0001-5685-2366$$aAngurel, L.A.$$uUniversidad de Zaragoza
000170065 7102_ $$15002$$2515$$aUniversidad de Zaragoza$$bDpto. Ingeniería Diseño Fabri.$$cÁrea Ing. Procesos Fabricación
000170065 7102_ $$15001$$2065$$aUniversidad de Zaragoza$$bDpto. Ciencia Tecnol.Mater.Fl.$$cÁrea Cienc.Mater. Ingen.Metal.
000170065 773__ $$g731 (2026), 166415 [13 pp.]$$pAppl. surf. sci.$$tApplied Surface Science$$x0169-4332
000170065 8564_ $$s14522284$$uhttps://zaguan.unizar.es/record/170065/files/texto_completo.pdf$$yVersión publicada
000170065 8564_ $$s2383107$$uhttps://zaguan.unizar.es/record/170065/files/texto_completo.jpg?subformat=icon$$xicon$$yVersión publicada
000170065 909CO $$ooai:zaguan.unizar.es:170065$$particulos$$pdriver
000170065 951__ $$a2026-03-16-08:17:58
000170065 980__ $$aARTICLE