36756 20200221144245.0 doi 10.3390/s16010084 sideral 93105 ART-2016-93105 eng (orcid)0000-0002-3069-2736 Torralba Gracia, Marta Design optimization for the measurement accuracy improvement of a large range nanopositioning stage 2016 Access copy available to the general public Unrestricted Both an accurate machine design and an adequate metrology loop definition are critical factors when precision positioning represents a key issue for the final system performance. This article discusses the error budget methodology as an advantageous technique to improve the measurement accuracy of a 2D-long range stage during its design phase. The nanopositioning platform NanoPla is here presented. Its specifications, e.g., XY-travel range of 50 mm ˆ 50 mm and sub-micrometric accuracy; and some novel designed solutions, e.g., a three-layer and two-stage architecture are described. Once defined the prototype, an error analysis is performed to propose improvement design features. Then, the metrology loop of the system is mathematically modelled to define the propagation of the different sources. Several simplifications and design hypothesis are justified and validated, including the assumption of rigid body behavior, which is demonstrated after a finite element analysis verification. The different error sources and their estimated contributions are enumerated in order to conclude with the final error values obtained from the error budget. The measurement deviations obtained demonstrate the important influence of the working environmental conditions, the flatness error of the plane mirror reflectors and the accurate manufacture and assembly of the components forming the metrological loop. Thus, a temperature control of ¿0.1 ¿C results in an acceptable maximum positioning error for the developed NanoPla stage, i.e., 41 nm, 36 nm and 48 nm in X-, Y- and Z-axis, respectively. info:eu-repo/grantAgreement/ES/UZ/PIFUZ-2014-TEC-05 info:eu-repo/grantAgreement/ES/MINECO/DPI2010-21629-C02-01 info:eu-repo/semantics/openAccess by http://creativecommons.org/licenses/by/3.0/es/ 2.677 2016 INSTRUMENTS & INSTRUMENTATION 10 / 58 = 0.172 2016 Q1 T1 CHEMISTRY, ANALYTICAL 25 / 76 = 0.329 2016 Q2 T1 ELECTROCHEMISTRY 12 / 29 = 0.414 2016 Q2 T2 0.623 2016 Electrical and Electronic Engineering 2016 Q1 Analytical Chemistry 2016 Q2 Atomic and Molecular Physics, and Optics 2016 Q2 Medicine (miscellaneous) 2016 Q2 Instrumentation 2016 Q2 Biochemistry 2016 Q3 info:eu-repo/semantics/article info:eu-repo/semantics/publishedVersion (orcid)0000-0001-7152-4117 Yagüe Fabra, José Antonio Universidad de Zaragoza (orcid)0000-0003-4839-0610 Albajez García, José Antonio Universidad de Zaragoza (orcid)0000-0002-8609-1358 Aguilar Martín, Juan José Universidad de Zaragoza 5002 515 Universidad de Zaragoza Dpto. Ingeniería Diseño Fabri. Área Ing. Procesos Fabricación 16, 1 (2016), 84 Sensors Sensors (Switzerland) 1424-8220 4456826 http://zaguan.unizar.es/record/36756/files/texto_completo.pdf Versión publicada 102764 http://zaguan.unizar.es/record/36756/files/texto_completo.jpg?subformat=icon icon Versión publicada oai:zaguan.unizar.es:36756 articulos driver 2020-02-21-13:24:15 ARTICLE