000060927 001__ 60927
000060927 005__ 20170406121707.0
000060927 0247_ $$2doi$$a10.1103/PhysRevB.75.205402
000060927 0248_ $$2sideral$$a79818
000060927 037__ $$aART-2007-79818
000060927 041__ $$aeng
000060927 100__ $$aLiu, A.C.Y.
000060927 245__ $$aStructural order in near-frictionless DLC films probed at three different length scales in transmission electron microscope
000060927 260__ $$c2007
000060927 5060_ $$aAccess copy available to the general public$$fUnrestricted
000060927 5203_ $$aA series of hydrogenated diamondlike carbon films grown using plasma-enhanced chemical-vapor deposition is systematically studied as a function of source gas composition using transmission electron microscopy. The structure of the films is examined at three distinct length scales. Both plan-view and cross-sectional studies are undertaken to reveal any large-scale inhomogeneities or anisotropy in the films. The degree of medium-range order in the films is measured by performing fluctuation electron microscopy on the plan-view and cross-sectional specimens. Electron-energy-loss spectroscopy is employed to measure the mass density and sp2:sp3 carbon bonding ratios of the samples. Thus, inhomogeneity as a function of depth in the film is revealed by the measurements of the short- and medium-range orders in the two different sample geometries. Soft, low-density diamondlike carbon films with low coefficients of friction are found to be more homogeneous as a function of depth in the film and possess reduced medium-range order in the surface layer. We find that these properties are promoted by employing a high hydrogen content methane and hydrogen admixture as the growth ambient. In contrast, harder, denser films with higher coefficients of friction possess a distinct surface layer with a relatively elevated level of carbon sp3 bonding and a higher degree of medium-range order. The structure of the films is examined in the light of the energetics of the growth process. It appears that a high flux of penetrating hydrogen ions modifies the surface layer containing the remnant damage from the carbon ions, homogenizing it and contributing to a lowering of the coefficient of friction.
000060927 540__ $$9info:eu-repo/semantics/openAccess$$aAll rights reserved$$uhttp://www.europeana.eu/rights/rr-f/
000060927 590__ $$a3.172$$b2007
000060927 591__ $$aPHYSICS, CONDENSED MATTER$$b9 / 59 = 0.153$$c2007$$dQ1$$eT1
000060927 655_4 $$ainfo:eu-repo/semantics/article$$vinfo:eu-repo/semantics/publishedVersion
000060927 700__ $$0(orcid)0000-0002-2071-9093$$aArenal, R.
000060927 700__ $$aMiller, D.J.
000060927 700__ $$aChen, X.
000060927 700__ $$aJohnson, J.A.
000060927 700__ $$aErylmaz, O.L.
000060927 700__ $$aErdemir, A.
000060927 700__ $$aWoodford, J.B.
000060927 773__ $$g75, 20 (2007), 205402 [13 pp.]$$pPhys. Rev. B, Condens. matter mater. phys.$$tPhysical Review B. Condensed matter and materials physics$$x1098-0121
000060927 8564_ $$s825635$$uhttps://zaguan.unizar.es/record/60927/files/texto_completo.pdf$$yVersión publicada
000060927 8564_ $$s113939$$uhttps://zaguan.unizar.es/record/60927/files/texto_completo.jpg?subformat=icon$$xicon$$yVersión publicada
000060927 909CO $$ooai:zaguan.unizar.es:60927$$particulos$$pdriver
000060927 951__ $$a2017-04-05-14:46:25
000060927 980__ $$aARTICLE