000061476 001__ 61476
000061476 005__ 20170612112602.0
000061476 0247_ $$2doi$$a10.1088/0957-4484/15/7/009
000061476 0248_ $$2sideral$$a95534
000061476 037__ $$aART-2004-95534
000061476 041__ $$aeng
000061476 100__ $$0(orcid)0000-0003-3000-0506$$aVillarroya, M.$$uUniversidad de Zaragoza
000061476 245__ $$aAFM lithography for the definition of nanometre scale gaps: Application to the fabrication of a cantilever-based sensor with electrochemical current detection
000061476 260__ $$c2004
000061476 5060_ $$aAccess copy available to the general public$$fUnrestricted
000061476 5203_ $$aThe concept, design and fabrication of a cantilever-based sensor operating in liquid for biochemical applications are reported. A novel approach for detecting the deflection of a functionalized cantilever is proposed. It consists of detecting the change of the electrochemical current level when a voltage is applied between a deflecting cantilever, acting as one of the electrodes, and a reference fixed electrode placed in close proximity to the free extreme of the cantilever. The detection is possible since the distance between the two electrodes is smaller than 50 nm. The sensor is fabricated by using a combination of MEMS technology and AFM-based lithography.
000061476 536__ $$9info:eu-repo/grantAgreement/ES/CICYT/DPI2000-0703-C03$$9info:eu-repo/grantAgreement/EUR/FP5/IST-2001-33068
000061476 540__ $$9info:eu-repo/semantics/openAccess$$aAll rights reserved$$uhttp://www.europeana.eu/rights/rr-f/
000061476 590__ $$a3.322$$b2004
000061476 591__ $$aMATERIALS SCIENCE, MULTIDISCIPLINARY$$b17 / 177 = 0.096$$c2004$$dQ1$$eT1
000061476 591__ $$aENGINEERING, MULTIDISCIPLINARY$$b1 / 61 = 0.016$$c2004$$dQ1$$eT1
000061476 591__ $$aPHYSICS, APPLIED$$b8 / 79 = 0.101$$c2004$$dQ1$$eT1
000061476 655_4 $$ainfo:eu-repo/semantics/article$$vinfo:eu-repo/semantics/acceptedVersion
000061476 700__ $$aPérez-Murano, F.
000061476 700__ $$aMartín, C.
000061476 700__ $$aDavis, Z.
000061476 700__ $$aBoisen, A.
000061476 700__ $$aEsteve, J.
000061476 700__ $$aFigueras, E.
000061476 700__ $$aMontserrat, J.
000061476 700__ $$aBarniol, N.
000061476 7102_ $$15007$$2035$$aUniversidad de Zaragoza$$bDepartamento de Informática e Ingeniería de Sistemas$$cArquitectura y Tecnología de Computadores
000061476 773__ $$g15, 7 (2004), 771-776$$pNanotechnology$$tNANOTECHNOLOGY$$x0957-4484
000061476 8564_ $$s1585417$$uhttps://zaguan.unizar.es/record/61476/files/texto_completo.pdf$$yPostprint
000061476 8564_ $$s34900$$uhttps://zaguan.unizar.es/record/61476/files/texto_completo.jpg?subformat=icon$$xicon$$yPostprint
000061476 909CO $$ooai:zaguan.unizar.es:61476$$particulos$$pdriver
000061476 951__ $$a2017-06-12-09:39:18
000061476 980__ $$aARTICLE