61476 20170612112602.0 doi 10.1088/0957-4484/15/7/009 sideral 95534 ART-2004-95534 eng (orcid)0000-0003-3000-0506 Villarroya, M. Universidad de Zaragoza AFM lithography for the definition of nanometre scale gaps: Application to the fabrication of a cantilever-based sensor with electrochemical current detection 2004 Access copy available to the general public Unrestricted The concept, design and fabrication of a cantilever-based sensor operating in liquid for biochemical applications are reported. A novel approach for detecting the deflection of a functionalized cantilever is proposed. It consists of detecting the change of the electrochemical current level when a voltage is applied between a deflecting cantilever, acting as one of the electrodes, and a reference fixed electrode placed in close proximity to the free extreme of the cantilever. The detection is possible since the distance between the two electrodes is smaller than 50 nm. The sensor is fabricated by using a combination of MEMS technology and AFM-based lithography. info:eu-repo/grantAgreement/ES/CICYT/DPI2000-0703-C03 info:eu-repo/grantAgreement/EUR/FP5/IST-2001-33068 info:eu-repo/semantics/openAccess All rights reserved http://www.europeana.eu/rights/rr-f/ 3.322 2004 MATERIALS SCIENCE, MULTIDISCIPLINARY 17 / 177 = 0.096 2004 Q1 T1 ENGINEERING, MULTIDISCIPLINARY 1 / 61 = 0.016 2004 Q1 T1 PHYSICS, APPLIED 8 / 79 = 0.101 2004 Q1 T1 info:eu-repo/semantics/article info:eu-repo/semantics/acceptedVersion Pérez-Murano, F. Martín, C. Davis, Z. Boisen, A. Esteve, J. Figueras, E. Montserrat, J. Barniol, N. 5007 035 Universidad de Zaragoza Departamento de Informática e Ingeniería de Sistemas Arquitectura y Tecnología de Computadores 15, 7 (2004), 771-776 Nanotechnology NANOTECHNOLOGY 0957-4484 1585417 http://zaguan.unizar.es/record/61476/files/texto_completo.pdf Postprint 34900 http://zaguan.unizar.es/record/61476/files/texto_completo.jpg?subformat=icon icon Postprint oai:zaguan.unizar.es:61476 articulos driver 2017-06-12-09:39:18 ARTICLE