Structural and electrical properties of indium oxide thin films grown by pulsed laser deposition in oxygen ambient

Stankiewicz, J. (Universidad de Zaragoza) ; Torrelles, X. ; García-Muñoz, J. L. ; Blasco, J. (Universidad de Zaragoza)

Resumen: We report results of structural, optical and electrical transport studies of indium oxide (IO) thin films grown by Pulsed Laser Deposition (PLD) under various oxygen gas pressures and using different substrates at 350° C. We find that the morphology and electrical resistivity of these films which are highly transparent changes drastically as O2pressure increases into mbar range, irrespective of substrate. A systematic increase in resistivity, coming mainly from a drop in the electron concentration, is observed as oxygen pressure varies from 0.0004 to 1 mbar. This could permit modulation of IO thin–films’ electrical parameters by more than three orders of magnitude suggesting that PLD grown films could be an attractive material for optoelectronic applications.

Idioma: Inglés

DOI: 10.1016/j.jallcom.2016.10.149

Año: 2017

Publicado en: JOURNAL OF ALLOYS AND COMPOUNDS 694 (2017), 1280-1286
ISSN: 0925-8388

Factor impacto JCR: 3.779 (2017)

Categ. JCR: MATERIALS SCIENCE, MULTIDISCIPLINARY rank: 62 / 285 = 0.218 (2017) - Q1 - T1
Categ. JCR: METALLURGY & METALLURGICAL ENGINEERING rank: 4 / 75 = 0.053 (2017) - Q1 - T1
Categ. JCR: CHEMISTRY, PHYSICAL rank: 49 / 146 = 0.336 (2017) - Q2 - T2

Factor impacto SCIMAGO: 1.02 - Materials Chemistry (Q1) - Metals and Alloys (Q1) - Mechanics of Materials (Q1) - Mechanical Engineering (Q1)

Financiación: info:eu-repo/grantAgreement/ES/MINECO/MAT2012-38213-C02-01
Financiación: info:eu-repo/grantAgreement/ES/MINECO/MAT2012-38213-C02-02
Financiación: info:eu-repo/grantAgreement/ES/MINECO/MAT2015-686760-02-1-P
Financiación: info:eu-repo/grantAgreement/ES/MINECO/MAT2015-686760-02-2-P

Tipo y forma: Artículo (PostPrint)

Área (Departamento): Área Física Materia Condensada (Dpto. Física Materia Condensa.)