76101 20190709135622.0 doi 10.1103/PhysRevMaterials.2.013401 sideral 104005 ART-2018-104005 eng Torrejón, Luis Growth and structural characterization of strained epitaxial Hf0.5Zr0.5O2 thin films 2018 Access copy available to the general public Unrestricted Ferroelectricity was recently reported in thin films with several compositions in the HfO2-ZrO2 system with orthorhombic crystal structure. In the present paper we study the growth by pulsed laser deposition and the structural characterization of strained epitaxial Hf0.5 Zr0.5 O2 films on (001)-oriented yttria-stabilized zirconia (YSZ) substrates. We have determined the conditions for the coherent growth and correlated the deposition parameters with the films structure and microstructure studied through a combination of x-ray diffraction, electron backscatter diffraction, and scanning transmission electron microscopy. In the range of experimental parameters explored, all the films show monoclinic structure with distorted lattice parameters relative to bulk. info:eu-repo/grantAgreement/ES/MINECO/MAT2014-51982-C2 info:eu-repo/grantAgreement/ES/MINECO/MAT2015-68760-C2-1-P info:eu-repo/grantAgreement/ES/MINECO/MAT2017-82970-C2 info:eu-repo/semantics/openAccess All rights reserved http://www.europeana.eu/rights/rr-f/ 2.926 2018 MATERIALS SCIENCE, MULTIDISCIPLINARY 105 / 293 = 0.358 2018 Q2 T2 info:eu-repo/semantics/article info:eu-repo/semantics/publishedVersion (orcid)0000-0002-6944-4713 Langenberg, Eric (orcid)0000-0002-6761-6171 Magén, César Universidad de Zaragoza (orcid)0000-0002-0809-641X Larrea, Ángel Universidad de Zaragoza (orcid)0000-0002-9706-3272 Blasco, Javier Universidad de Zaragoza Santiso, José (orcid)0000-0002-4698-3378 Algarabel, Pedro A. Universidad de Zaragoza (orcid)0000-0002-0111-8284 Pardo, José Ángel Universidad de Zaragoza 2003 395 Universidad de Zaragoza Dpto. Física Materia Condensa. Área Física Materia Condensada 5001 065 Universidad de Zaragoza Dpto. Ciencia Tecnol.Mater.Fl. Área Cienc.Mater. Ingen.Metal. 2, 1 (2018), 013401 [7 pp.] Phys. rev. mater. Physical Review Materials 2475-9953 1609376 http://zaguan.unizar.es/record/76101/files/texto_completo.pdf Versión publicada 31218 http://zaguan.unizar.es/record/76101/files/texto_completo.jpg?subformat=icon icon Versión publicada oai:zaguan.unizar.es:76101 articulos driver 2019-07-09-12:28:33 ARTICLE