78003 20211008114731.0 doi 10.1088/0960-1317/26/8/084010 sideral 93317 ART-2016-93317 eng Almazán, F. Universidad de Zaragoza (orcid)0000-0001-5063-2987 Zeolite based microconcentrators for volatile organic compounds sensing at trace-level: fabrication and performance 2016 Access copy available to the general public Unrestricted A novel 6-step microfabrication process is proposed in this work to prepare microfluidic devices with integrated zeolite layers. In particular, microfabricated preconcentrators designed for volatile organic compounds (VOC) sensing applications are fully described. The main novelty of this work is the integration of the pure siliceous MFI type zeolite (silicalite-1) polycrystalline layer, i.e. 4.0¿¿±¿¿0.5 µm thick, as active phase, within the microfabrication process just before the anodic bonding step. Following this new procedure, Si microdevices with an excellent distribution of the adsorbent material, integrated resistive heaters and Pyrex caps have been obtained. Firstly, the microconcentrator performance has been assessed by means of the normal hexane breakthrough curves as a function of sampling and desorption flowrates, temperature and micropreconcentrator design. In a step further, the best preconcentrator device has been tested in combination with downstream Si based microcantilevers deployed as VOC detectors. Thus, a preliminar evaluation of the improvement on detection sensitivity by silicalite-1 based microconcentrators is presented. info:eu-repo/grantAgreement/ES/MICINN/CTQ2013-49068-C2-1-R info:eu-repo/grantAgreement/ES/MICINN/CTQ2013-49068-C2-2-R info:eu-repo/semantics/openAccess All rights reserved http://www.europeana.eu/rights/rr-f/ 1.794 2016 ENGINEERING, ELECTRICAL & ELECTRONIC 122 / 260 = 0.469 2016 Q2 T2 INSTRUMENTS & INSTRUMENTATION 24 / 58 = 0.414 2016 Q2 T2 PHYSICS, APPLIED 67 / 147 = 0.456 2016 Q2 T2 NANOSCIENCE & NANOTECHNOLOGY 59 / 87 = 0.678 2016 Q3 T3 0.63 2016 Electrical and Electronic Engineering 2016 Q1 Nanoscience and Nanotechnology 2016 Q2 Mechanics of Materials 2016 Q2 Electronic, Optical and Magnetic Materials 2016 Q2 Mechanical Engineering 2016 Q2 info:eu-repo/semantics/article info:eu-repo/semantics/acceptedVersion Pellejero, I. (orcid)0000-0002-8448-7543 Morales, A. Urbiztondo, M.A. Universidad de Zaragoza (orcid)0000-0002-4931-1358 Sesé, J. Universidad de Zaragoza (orcid)0000-0002-7742-9329 Pina, M.P. Universidad de Zaragoza (orcid)0000-0001-9897-6527 Santamaría, J. Universidad de Zaragoza (orcid)0000-0002-8701-9745 5005 555 Universidad de Zaragoza Dpto. Ing.Quím.Tecnol.Med.Amb. Área Ingeniería Química 5005 790 Universidad de Zaragoza Dpto. Ing.Quím.Tecnol.Med.Amb. Área Tecnologi. Medio Ambiente 2003 395 Universidad de Zaragoza Dpto. Física Materia Condensa. Área Física Materia Condensada 26, 8 (2016), 084010 [12 pp] J. micromechanics microengineering JOURNAL OF MICROMECHANICS AND MICROENGINEERING 0960-1317 760076 http://zaguan.unizar.es/record/78003/files/texto_completo.pdf Postprint 77531 http://zaguan.unizar.es/record/78003/files/texto_completo.jpg?subformat=icon icon Postprint oai:zaguan.unizar.es:78003 articulos driver 2021-10-08-11:37:20 ARTICLE